Sample holder and superconducting quantum computer

ABSTRACT

A sample holder includes a base comprising a support structure and a printed circuit board (PCB) in contact with the base. The PCB includes: a dielectric; a front-surface ground (GND) formed on a front surface of the dielectric; a back-surface GND formed on a back surface of the dielectric; a through hole penetrating from the front-surface GND to the back-surface GND, the through hole in which a chip is disposed, and a conductor that electrically connects the front-surface GND and the back-surface GND on an end face of the through hole. At least a part of the base below the through hole has a cavity. The support structure that supports a surface of the chip and is electrically connected to the base. The support structure is disposed in the cavity.

This application is based upon and claims the benefit of priority from Japanese Patent Application No. 2021-085815, filed on May 21, 2021, the disclosure of which is incorporated herein in its entirety by reference.

TECHNICAL FIELD

The present disclosure relates to a sample holder and the like.

BACKGROUND ART

The superconducting quantum circuit is formed on a substrate such as a silicon substrate using a superconducting material such as niobium (Nb) or aluminum (Al). Here, a thing in which a superconducting quantum circuit is formed on a substrate is referred to as a chip. The superconducting quantum circuit is mounted on a sample holder and operated. There are various structures of the sample holder. Chip mounting methods include a method of mounting a chip on a printed circuit board with the surface of the circuit of the chip flipped as described in B. Lienhard, et al., “Microwave Packaging for Superconducting Qubits,” arXiv: 1906.05425v1 [quant-ph] 12 Jun. 2019, and a method of mounting a chip on a printed circuit board with the surface of the circuit of the chip flipped (flip chip mounting) as described in JP 2002-299503 A. In the following description, description will be given on the premise of the former mounting method.

For example, there is a structure in which a printed circuit board (PCB) is placed on a metal base. A through hole is provided near the center of the PCB, a chip is disposed in the through hole, and bonding wires such as Al electrically connects between a pad of the chip and a pad of the PCB and between a ground of the chip and a ground of the PCB. In such a case, the back surface of the chip is in contact with the metal base.

In a case where a chip is mounted on the sample holder as described above, resonance occurs when a signal of a specific frequency is input to the chip. Here, this resonance is referred to as chip mode resonance. When the resonance of the chip mode is combined with the superconducting quantum circuit on the chip, decoherence of the superconducting quantum circuit is caused. In order to reduce the influence of the decoherence, the resonance frequency of the chip mode is increased as much as possible. For example, B. Lienhard, et al., “Microwave Packaging for Superconducting Qubits,” arXiv: 1906.05425v1 [quant-ph] 12 Jun. 2019 describes that in order to suppress the influence of the chip mode, a cavity is formed immediately below the chip by hollowing out a part of the metal base immediately below the chip in the above-described structure.

SUMMARY

An example of the object of the present disclosure is to provide a sample holder or the like that increases a resonance frequency of resonance that occurs when a signal of a specific frequency is input to a chip in a case where the chip is mounted on the sample holder.

A sample holder according to one aspect of the present disclosure includes: a base including a support structure; and a PCB in contact with the base. The PCB includes a dielectric, a front-surface ground that is formed on a front surface of the dielectric, a back-surface ground that is formed on a back surface of the dielectric, a through hole that penetrates from the front-surface ground to the back-surface ground, a chip is disposed in the through hole, and a conductor that electrically connects the front-surface ground and the back-surface ground. The conductor is disposed on an end face of the through hole. At least a part of the base below the through hole has a cavity. The support structure supports a surface of the chip and is electrically connected to the base. The support structure is disposed in the cavity.

A superconducting quantum computer according to one aspect of the present disclosure includes: a sample holder; and a chip on which a superconducting quantum circuit is formed, the chip that is disposed in the sample holder. The sample holder includes a base including a support structure, and a PCB in contact with the base. The PCB includes a dielectric, a front-surface ground that is formed on a front surface of the dielectric, a back-surface ground that is formed on a back surface of the dielectric, a through hole that penetrates from the front-surface ground to the back-surface ground, wherein a chip is disposed in the through hole, and, a conductor that electrically connects the front-surface ground and the back-surface ground, wherein the conductor is disposed on an end face of the through hole. At least a part of the base below the through hole has a cavity. The support structure supports a surface of the chip and is electrically connected to the base. The support structure is disposed in the cavity.

BRIEF DESCRIPTION OF THE DRAWINGS

Exemplary features and advantages of the present disclosure will become apparent from the following detailed description when taken with the accompanying drawings in which:

FIG. 1A is an explanatory diagram showing an example of a sample holder that holds a chip on which a superconducting quantum circuit is formed;

FIG. 1B is a side view of the sample holder shown in FIG. 1A;

FIG. 2A is a top view of a PCB;

FIG. 2B is a bottom view of the PCB;

FIG. 2C is a side view of the PCB;

FIG. 2D is a perspective view of the PCB;

FIG. 2E is an enlarged view of the PCB near a through hole;

FIG. 3A is a perspective view showing a configuration in a case where a chip of a superconducting quantum circuit is mounted on the sample holder shown in FIGS. 1A and 1B;

FIG. 3B is an end view in which the configuration in a case where a chip of a superconducting quantum circuit is mounted on the sample holder shown in FIGS. 1A and 1B is cut with a plane parallel to an xz plane including a cutting line A-AA shown in FIG. 3A;

FIG. 4A is a top view of a chip used in simulation;

FIG. 4B is an enlarged view of a first coplanar waveguide near a tip end;

FIG. 5A is a perspective view showing an example in which the chip shown in FIGS. 4A and 4B is mounted on the sample holder shown in FIGS. 1A and 1B;

FIG. 5B is an enlarged view near the chip;

FIG. 6A is an explanatory diagram showing reflection (S11) to Port 1 when a high-frequency signal is input from Port 1 shown in FIG. 5A;

FIG. 6B is an explanatory diagram showing transmission (S21) to Port 2 when a high-frequency signal is input from Port 1 shown in FIG. 5A;

FIG. 7A is a perspective view of the sample holder in which a cavity is formed in a base;

FIG. 7B is a top view of the sample holder in which the cavity is formed in the base;

FIG. 7C is an end view in which the sample holder in which the cavity is formed on the base is cut with a plane parallel to the xz plane including a cutting line B-BB shown in FIG. 7B;

FIG. 8 is an explanatory diagram showing a simulation result of reflection (S11) to Port 1 when a high-frequency signal is input from Port 1 shown in FIG. 5A in a case where the chip shown in FIGS. 4A and 4B is mounted on the sample holder shown in FIGS. 7A, 7B, and 7C;

FIG. 9 is an explanatory diagram showing the sample holder according to a first example embodiment;

FIG. 10A is a perspective view showing the sample holder of the first example embodiment;

FIG. 10B is a top view of the sample holder of the first example embodiment;

FIG. 10C is an end view in which the sample holder of the first example embodiment is cut with a plane parallel to the xz plane including a cutting line C-CC shown in FIG. 10B;

FIG. 11A is a top view of a PCB used in the sample holder of the first example embodiment;

FIG. 11B is a bottom view of the PCB used in the sample holder of the first example embodiment;

FIG. 11C is a side view of the PCB used in the sample holder of the first example embodiment;

FIG. 11D is a perspective view of the PCB used in the sample holder of the first example embodiment;

FIG. 11E is an enlarged view of the PCB used in the sample holder of the first example embodiment near the through hole;

FIG. 12 is an explanatory diagram showing a simulation result of S11 in a case where the chip is mounted with the bonding wire on the sample holder according to the first example embodiment;

FIG. 13A is a top view showing a structure of a PCB according to a modification of the first example embodiment;

FIG. 13B is a cross-sectional view in which the PCB according to the modification of the first example embodiment is cut with a plane parallel to an xy plane so that a core wire formed in a region sandwiched between a front-surface GND and a back-surface GND is visible;

FIG. 13C is an enlarged view of a cross section, near the core wire, of the PCB according to the modification of the first example embodiment that is cut with a plane parallel to the xz plane including a cutting line D-DD shown in FIG. 13A;

FIG. 13D is a bottom view showing a structure of the PCB according to the modification of the first example embodiment;

FIG. 13E is a perspective view of the PCB according to the modification of the first example embodiment;

FIG. 13F is an enlarged view of the PCB according to the modification of the first example embodiment near the through hole;

FIG. 14 is an enlarged view of the PCB used in the sample holder of a second example embodiment near the through hole;

FIG. 15 is an explanatory diagram showing a simulation result of S11 in a case where the chip is mounted with the bonding wire on the sample holder of the second example embodiment;

FIG. 16 is an enlarged view of the PCB used in the sample holder of a modification of the second example embodiment near the through hole;

FIG. 17A is a perspective view of the sample holder according to a third example embodiment;

FIG. 17B is a top view of the sample holder according to the third example embodiment;

FIG. 17C is an end view in which the sample holder according to the third example embodiment is cut with a plane parallel to the xz plane including a cutting line E-EE shown in FIG. 17B;

FIG. 18 is an explanatory diagram showing a simulation result of S11 according to the third example embodiment;

FIG. 19A is a perspective view of the sample holder according to another example of the third example embodiment;

FIG. 19B is a top view of the sample holder according to the another example of the third example embodiment;

FIG. 19C is an end view in which the sample holder according to the another example of the third example embodiment is cut with a plane parallel to the xz plane including a cutting line F-FF shown in FIG. 19B;

FIG. 20 is an explanatory diagram showing a simulation result of S11 according to the another example of the third example embodiment;

FIG. 21A is a perspective view of the sample holder according to a modification of the third example embodiment;

FIG. 21B is a top view of the sample holder according to the modification of the third example embodiment;

FIG. 21C is an end view in which the sample holder according to the modification of the third example embodiment is cut with a plane parallel to the xz plane including a cutting line G-GG shown in FIG. 21B;

FIG. 22 is an explanatory diagram showing a simulation result of S11 in a case where the chip is mounted with the bonding wire on the sample holder using a base in which a cavity is formed, shown in FIGS. 21A to 21C;

FIG. 23A is a perspective view of the sample holder according to a fourth example embodiment;

FIG. 23B is a top view of the sample holder according to the fourth example embodiment;

FIG. 23C is an end view in which the sample holder according to the fourth example embodiment is cut with a plane parallel to the xz plane including a cutting line H-HH shown in FIG. 23B;

FIG. 24 is an explanatory diagram showing a simulation result of S11 in a case where the chip is mounted with the bonding wire on the sample holder according to the fourth example embodiment;

FIG. 25A is a perspective view of the sample holder according to a modification of the fourth example embodiment;

FIG. 25B is a top view of the sample holder according to the modification of the fourth example embodiment;

FIG. 25C is an end view in which the sample holder according to the modification of the fourth example embodiment is cut with a plane parallel to the xz plane including a cutting line I-II shown in FIG. 25B;

FIG. 26 is an explanatory diagram showing a simulation result of S11 in a case where the chip is mounted on the sample holder using a base in which a cavity is formed, shown in FIGS. 25A to 25C;

FIG. 27A is a perspective view of the sample holder of a fifth example embodiment;

FIG. 27B is a top view of the sample holder of the fifth example embodiment;

FIG. 27C is a cross-sectional view in which the sample holder of the fifth example embodiment is cut with a plane parallel to the xz plane including a cutting line J-JJ shown in FIG. 27B;

FIG. 28A is a perspective view showing a shape example 1 of the cavity of the sample holder of the fifth example embodiment;

FIG. 28B is a top view showing the shape example 1 of the cavity of the sample holder of the fifth example embodiment;

FIG. 28C is an end view in which in an example shape 1 of the cavity of the sample holder of the fifth example embodiment, the sample holder is cut along near the cavity with a plane parallel to the xz plane including a cutting line K-KK shown in FIG. 28B;

FIG. 29A is a perspective view showing a shape example 2 of the cavity of the sample holder of the fifth example embodiment;

FIG. 29B is a top view showing the shape example 2 of the cavity of the sample holder of the fifth example embodiment;

FIG. 29C is a cross-sectional view in which the sample holder is cut with a plane parallel to the xz plane including a cutting line L-LL shown in FIG. 29B in the example shape 2 of the cavity of the sample holder of the fifth example embodiment;

FIG. 30 is an explanatory diagram showing a simulation result of S11 of a system in which the chip is mounted on the sample holder of the fifth example embodiment;

FIG. 31A is a perspective view of the sample holder of a modification of the fifth example embodiment;

FIG. 31B is a top view of the sample holder of the modification of the fifth example embodiment;

FIG. 31C is a cross-sectional view in which the sample holder of the modification of the fifth example embodiment is cut with a plane parallel to the xz plane including a cutting line M-MM shown in FIG. 31B;

FIG. 32A is a perspective view showing the shape example 1 of the cavity of the sample holder of the modification of the fifth example embodiment;

FIG. 32B is a top view showing the shape example 1 of the cavity of the sample holder of the modification of the fifth example embodiment;

FIG. 32C is an end view in which in the example shape 1 of the cavity of the sample holder of the modification of the fifth example embodiment, the sample holder is cut near the cavity with a plane parallel to the xz plane including a cutting line N-NN shown in FIG. 32B;

FIG. 33A is a perspective view showing the shape example 2 of the cavity of the sample holder of the modification of the fifth example embodiment;

FIG. 33B is a top view showing the shape example 2 of the cavity of the sample holder of the modification of the fifth example embodiment;

FIG. 33C is a cross-sectional view in which the sample holder is cut with a plane parallel to the xz plane including a cutting line O-OO shown in FIG. 33B in the example shape 2 of the cavity of the sample holder of the modification of the fifth example embodiment; and

FIG. 34 is an explanatory diagram showing a simulation result of S11 of the system in which the chip is mounted by the bonding wire on the sample holder of the modification of the fifth example embodiment.

EXAMPLE EMBODIMENT

Example embodiments of the sample holder and the superconducting quantum computer according to the present disclosure will be described below in detail with reference to the drawings. However, the drawings schematically show the configuration in the example embodiments of the present disclosure. The example embodiments of the present disclosure described below are examples, and can be appropriately changed within the scope of the same essence. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. In the following drawings, elements and the like that are not used for description are appropriately omitted. In the following description, the ground may be referred to as GND. For example, the front-surface ground is referred to as front-surface GND. For example, the back-surface ground is referred to as back-surface GND.

In order to make the effect of the sample holder according to each example embodiment clearer, a result of modeling and simulating of the sample holder in which a cavity is formed in the base immediately below the chip is compared with a result of modeling and simulating of the sample holder according to each example embodiment. Therefore, before the detailed description of the example embodiments, first, the problem of chip mode in the superconducting quantum circuit will be described in more detail. Then, the result of modeling and simulating of the sample holder to be compared with the sample holder according to each example embodiment will be described. In the sample holder to be compared, a PCB is placed on a metal base. This sample holder is provided with a through hole near the center of the PCB. In this sample holder, a part of a metal base immediately below the chip is hollowed out to form a cavity immediately below the chip.

In the drawings, in order to make the orientation clear, description will be made using an x axis, a y axis, and a z axis as a three-dimensional coordinate system.

FIG. 1A is an explanatory diagram showing an example of a sample holder that holds a chip on which a superconducting quantum circuit is formed. FIG. 1B is a side view of a sample holder 101 shown in FIG. 1A. As shown in FIG. 1A, the sample holder 101 has the configuration in which a PCB 103 is placed on a metal base 102. In FIG. 1A, the shape of the base 102 is a rectangular parallelepiped or a cube. A through hole 104 penetrating the PCB 103 is provided near the center of the PCB 103.

An example of the PCB 103 is shown in FIGS. 2A to 2E. FIG. 2A is a top view of the PCB 103. FIG. 2B is a bottom view of the PCB 103. FIG. 2C is a side view of the PCB 103. FIG. 2D is a perspective view of the PCB 103. FIG. 2E is an enlarged view of the PCB 103 near the through hole 104.

As shown in FIGS. 2A to 2E, the PCB 103 has a structure in which, for example, a front-surface GND 109 and a core wire 110 of a coplanar waveguide are formed on one surface of a plate-like dielectric 108 extending in parallel to the xy plane, and a back-surface GND 111 is formed on the other surface of the dielectric 108. The core wire 110, the front-surface GND 109, and the back-surface GND 111 are conductors, for example, metals. Here, the coplanar waveguide is a waveguide that includes a central conductor and two GND planes arranged on both side surfaces of the central conductor with a gap interposed between the central conductor and the two GND planes on the xy plane, and has a structure where the central conductor and the two GND planes are arranged on substantially the same plane. The two GND planes of the coplanar waveguide shown in FIGS. 2A and 2E are formed by the front-surface GND 109. In the PCB 103 shown in FIGS. 2A to 2E, the core wire 110 corresponds to the central conductor. In the PCB 103 shown in FIGS. 2A to 2E, the coplanar waveguide is formed by forming the front-surface GND 109 on both side surfaces of the core wire 110 with a gap on the xy plane. In the example shown in FIGS. 2A to 2E, eight coplanar waveguides are formed on the PCB 103. As shown in FIG. 2D, the PCB 103 is provided with a plurality of through holes 112. These through holes 112 penetrate the dielectric 108 and electrically connect the front-surface GND 109 and the back-surface GND 111. For example, the through hole 112 is produced by forming a hole that penetrates the dielectric 108, the front-surface GND 109, and the back-surface GND 111 and then plating the inside of the hole with metal. In FIGS. 1A and 1B, the back-surface GND 111 of the PCB 103 is in contact with the base 102. Therefore, the metal base 102, the back-surface GND 111 of the PCB 103, the through hole 112 of the PCB 103, and the front-surface GND 109 of the PCB 103 are electrically connected. The through hole 104 provided near the center of the PCB 103 has, for example, the same shape as the that of the chip of the superconducting quantum circuit mounted on the sample holder 101, that is, a rectangular or square shape. In order to allow the chip to enter the inside of the through hole 104, the area of the through hole 104 is larger than the area of the chip.

Next, FIGS. 3A and 3B show the configuration in a case where a chip 107 of the superconducting quantum circuit is mounted on the sample holder 101 shown in FIGS. 1A and 1B. FIG. 3A is a perspective view showing the configuration in a case where the chip 107 of a superconducting quantum circuit is mounted on the sample holder 101 shown in FIGS. 1A and 1B. FIG. 3B is an end view in which the configuration in a case where the chip 107 of a superconducting quantum circuit is mounted on the sample holder 101 shown in FIGS. 1A and 1B is cut with a plane parallel to the xz plane including the cutting line A-AA shown in FIG. 3A. In FIGS. 3A and 3B, the PCB 103 shown in FIGS. 2A to 2E is used. As shown in FIGS. 3A and 3B, the chip 107 is placed inside the through hole 104 of the PCB 103, the chip 107 is placed on the base 102, the pad of the chip 107 and the core wire 110 of the PCB 103 are electrically connected by a bonding wire 113 such as aluminum (Al), and the GND plane of the chip 107 and the front-surface GND 109 of the PCB are electrically connected by the bonding wire 113 such as Al. Here, the pad of the chip 107 is a signal input/output terminal formed on the chip 107. In the example shown in FIGS. 3A and 3B, the back surface of the chip 107 is in contact with the metal base 102. In FIG. 3B, the back surface of the chip 107 is lower surface of the chip 107.

In a case where the chip 107 is mounted on the sample holder 101 shown in FIGS. 1A and 1B, resonance occurs when a signal of a specific frequency is input to the chip 107. In order to identify the cause of the resonance in the chip mode, simulation is performed using electromagnetic field analysis software. Here, simulation is performed using ANSYS® HFSS developed by Ansys Japan Inc. Simulation is performed using the same tool in the simulation hereinafter.

The chip is shown in FIGS. 4A and 4B. FIG. 4A is a top view of the chip 107 used in simulation. FIG. 4B is an enlarged view of a first coplanar waveguide 71 near the tip end. As shown in FIG. 4A, the chip 107 has a rectangular or square shape, and the lengths of the sides of the chip 107 are v and w. In the following description, the simulation assumes that the shape of the chip 107 is square, and the length of each side of the chip 107 is v=w=5 [mm] (millimeters). In the chip 107 used in the simulation, a metal film having a thickness of 200 [nm] (nanometers) is laminated on a silicon substrate having a thickness of 380 [μm] (micrometers), and a predetermined part of the metal film is removed, whereby a circuit pattern is formed. In the chip 107 shown in FIGS. 4A and 4B, the first coplanar waveguide 71 and a second coplanar waveguide 72 are formed. The first coplanar waveguide 71 and the second coplanar waveguide 72 have the same shape. The characteristic impedance of the first coplanar waveguide 71 and the second coplanar waveguide 72 is designed to 50 [Ω] (ohms) and the length is 1 [mm]. FIG. 4B shows the enlarged view of the first coplanar waveguide 71 near the tip end. As shown in FIG. 4B, the tip end of the first coplanar waveguide 71 is not in contact with a GND plane 73. As shown in FIG. 4A, the first coplanar waveguide 71 and the second coplanar waveguide 72 are not connected. Similarly, the tip end of the second coplanar waveguide 72 is also not in contact with the GND plane 73. One end of a first core wire 74 is connected to a first pad 76, and one end of a second core wire 75 is connected to a second pad 77.

FIGS. 5A and 5B show an example in which the chip 107 shown in FIGS. 4A and 4B is mounted on the sample holder 101 shown in FIGS. 1A and 1B. FIG. 5A is a perspective view showing an example in which the chip 107 shown in FIGS. 4A and 4B is mounted on the sample holder 101 shown in FIGS. 1A and 1B. FIG. 5B is an enlarged view near the chip 107. As shown in FIGS. 5A and 5B, the first pad 76 of the chip 107 is electrically connected to a first core wire 110 a of the PCB 103 by the bonding wire 113 of Al. The second pad 77 of the chip 107 is electrically connected to a second core wire 110 b of the PCB 103 by the bonding wire 113 of Al, and the GND plane 73 of the chip 107 is electrically connected to the front-surface GND 109 of the PCB 103 by the bonding wire 113 of Al. As shown in FIG. 5A, the other end of the first core wire 110 a of the PCB 103 than the end connected to the first pad 76 of the chip 107 is defined as Port 1. On the other hand, the other end of the second core wire 110 b of the PCB 103 than the end connected to the second pad 77 of the chip 107 is defined as Port 2. In the simulation, reflection to Port 1 and transmission to Port 2 when a high-frequency signal is input from Port 1, for example, are calculated. Here, reflection to Port 1 is denoted by S11, and transmission to Port 2 is denoted by S21.

FIGS. 6A and 6B show simulation results when a high-frequency signal is input from Port 1 shown in FIG. 5A. FIG. 6A is an explanatory diagram showing reflection (S11) to Port 1 when a high-frequency signal is input from Port 1 shown in FIG. 5A. FIG. 6B is an explanatory diagram showing transmission (S21) to Port 1 when a high-frequency signal is input from Port 1 shown in FIG. 5A. In FIGS. 6A and 6B, the horizontal axis represents the frequency (unit: [GHz] (gigahertz)). S11 and S21 on the vertical axis are indicated in decibels ([dB]). That is, S11 and S21 on the vertical axis are indicated in logarithm. In the following description of the simulation results, the horizontal axis represents the frequency (unit: [GHz]), and S11 or S21 on the vertical axis are indicated in decibels ([dB]).

As shown in FIG. 6A and FIG. 6B, when signals of several specific frequencies are input, S21 becomes very large, and S11 becomes very small. As shown in FIGS. 4A and 4B, the first coplanar waveguide 71 and the second coplanar waveguide 72 of the chip 107 are not connected. Therefore, even if a signal is input to Port 1, it is expected that the signal will not be transmitted to Port 2. However, as shown by the simulation result of FIG. 6B, when signals of several specific frequencies are input from Port 1, S21 becomes very large. For example, according to the simulation result of FIG. 6B, S21 is about −1.9 [dB] when a signal of 8.9 [GHz] is input from Port 1. That is, the amount of about 65% of the energy of the signal input from Port 1 is transmitted to Port 2. The simulation result shown in FIG. 6A indicates that S11 becomes very small at such specific frequency at which S21 becomes very large.

From the above, the simulation results shown in FIGS. 6A and 6B indicate the following. That is, in the system in which the chip 107 of the superconducting quantum circuit is mounted on the sample holder 101 as shown in FIGS. 5A and 5B, the space sandwiched between the GND plane 73 on the front surface of the chip 107 and the metal base 102, that is, the silicon substrate forms a cavity resonator. The first coplanar waveguide 71 and the second coplanar waveguide 72 of the chip 107 are coupled with this cavity resonator. Therefore, when a signal having a frequency equal to the resonance frequency of this cavity resonator is input to the chip from Port 1, for example, resonance of the cavity resonator is excited. Then, a standing wave rises in the silicon substrate, and energy of the electromagnetic field is accumulated. Since the second coplanar waveguide 72 of the chip 107 is also coupled with this cavity resonator, a part of the energy of the electromagnetic field accumulated in the silicon substrate is transmitted to Port 2 through the second coplanar waveguide 72 of the chip 107.

Such a phenomenon can occur in the system shown in FIGS. 3A and 3B regardless of the type of the circuit formed in the chip 107. Such a phenomenon can occur not only in a case where the coplanar waveguides 71 and 72 as shown in FIGS. 4A and 4B are formed in the chip 107, but also in a case where an arbitrary superconducting quantum circuit is formed in the chip 107. In the mounting system as shown in FIG. 3, the resonance caused by the space sandwiched between the GND plane 73 and the metal base 102 on the surface of the chip 107, that is, the silicon substrate that forms the cavity resonator is referred to as resonance of the chip mode in the present description.

In the simulation results of FIG. 6A and FIG. 6B, several specific frequencies at which S21 becomes very large and S11 becomes very small are hereinafter referred to as resonance frequencies of the chip mode. When a signal having a frequency equal to or close to the resonance frequency of the chip mode is input to the chip 107, resonance of the chip mode occurs. According to the simulation results of FIGS. 6A and 6B, the lowest resonance frequency of the chip mode is 8.9 [GHz] in the system shown in FIGS. 5A and 5B. In the system shown in FIGS. 3A and 3B, where the chip 107 having the superconducting quantum circuit is mounted on the sample holder 101 shown in FIGS. 1A and 1B, when the chip mode is coupled with the superconducting quantum circuit formed on the chip 107, it causes decoherence of the superconducting quantum circuit. It is known that the resonance frequency of the chip mode needs to be as high as possible in order to reduce the influence of decoherence.

For this reason, a technology for increasing the resonance frequency of the chip mode is required. For example, in the sample holder 101 to be compared, the influence of the chip mode can be reduced by hollowing out a part of a section of the base 102 immediately below the chip 107 to form a cavity immediately below the chip 107.

FIGS. 7A to 7C show enlarged views of the sample holder 101 having a cavity formed in the base 102, near the through hole 104 of the PCB 103. FIG. 7A is a perspective view of the sample holder 101 in which the cavity is formed in the base. FIG. 7B is a top view of the sample holder 101 in which the cavity is formed in the base; FIG. 7C is an end view in which the sample holder 101 in which the cavity is formed in the base is cut with a plane parallel to the xz plane including the cutting line B-BB shown in FIG. 7B. As shown in FIGS. 7A to 7C, a cavity 105 is formed in a section of the base 102 immediately below the through hole 104 of the PCB 103. In other words, as shown in FIGS. 7A to 7C, in the base 102, the cavity 105 is formed in a section immediately below the chip 107 when the chip 107 is mounted on the sample holder 101. In FIGS. 7A to 7C, the cavity 105 has a quadrangular prism shape having a bottom surface having the same area as the area of the chip 107. The base 102 has a structure in which columns 106 are left at four corners of the cavity 105. The column 106 is made of metal, for example. In FIG. 7C, the chip 107 is mounted on the sample holder 101 with the bonding wire 113.

In FIGS. 7A, 7B, and 7C, in order to clearly show the columns 106, the columns 106 are indicated in a pattern different from that of the base 102. The metal columns 106 at the four corners are integrated with the base 102 and constitute a part of the base 102. Of the two bottom surfaces of the metal columns 106 at the four corners shown in FIGS. 7A to 7C, the upper bottom surface is in contact with the back surface of the chip 107. In FIGS. 7A and 7B, the bottom surface of the metal column 106 is an isosceles right triangle. As shown in FIG. 7C, simulation is performed for a case where the chip 107 of FIGS. 4A and 4B is mounted on the sample holder 101 of FIG. 7 with the lengths of the two equal sides of the bottom surface of the column 106 being 1 [mm] and the height of the cavity 105 being 3 [mm].

FIG. 8 is an explanatory diagram showing a simulation result of reflection (S11) to Port 1 when a high-frequency signal is input from Port 1 shown in FIG. 5A in a case where the chip 107 shown in FIGS. 4A and 4B is mounted with the bonding wire 113 on the sample holder 101 shown in FIGS. 7A, 7B, and 7C. The simulation result of FIG. 8 indicates that when the chip 107 shown in FIGS. 4A and 4B is mounted with the bonding wire 113 on the sample holder 101 in which the cavity 105 of FIG. 7 is formed on the base 102, the lowest resonance frequency of the chip mode can be increased to 19.9 [GHz]. In the simulation results shown in FIGS. 6A and 6B in a case where the cavity 105 is not formed in the base 102, the lowest resonance frequency of the chip mode is 8.9 [GHz]. This indicates that the resonance frequency of the chip mode can be significantly increased by using the sample holder 101 in which the cavity 105 of FIGS. 7A, 7B, and 7C is formed in the base 102.

The reason why the resonance frequency of the chip mode can be increased by forming the cavity 105 in the base 102 is inferred that, when the cavity 105 is formed immediately below the chip 107, the inside of the cavity resonator formed by the space sandwiched between the GND plane 73 on the front surface of the chip 107 and the base 102 (in this case, the bottom of the cavity 105) is silicon and vacuum. A thickness of the silicon is 380 [μm] in the simulation. A thickness of the vacuum is 3 [mm] in the simulation. Due to this, it is inferred to be because the effective permittivity inside the cavity resonator decreases as compared with the case where the cavity 105 is not formed in the base 102 (i.e., the case where the inside of the cavity resonator is substantially only silicon). The case where the cavity 105 is not formed in the base 102 is, in other words, the case where the inside of the cavity resonator is substantially only silicon. While the relative permittivity of vacuum is 1, the relative permittivity of silicon is 11.9, which is very high. The resonance frequency of the cavity resonator generally has a property that the lower the permittivity of the medium filling the inside of the cavity resonator is, the higher the resonance frequency becomes.

Thus, the resonance frequency of the chip mode can be increased by using the sample holder 101 in which the cavity 105 is formed in the base 102. However, in order to reduce the influence of the chip mode on the superconducting quantum circuit, it is required to make the resonance frequency of the chip mode as high as possible. It is predicted that the chip 107 having an area larger than 5 [mm]×5 [mm] will be required when the number of bits of quantum bits integrated on the chip 107 increases toward practical use of a quantum computer. The more the area of the chip 107 increases, the more the resonance frequency of the chip mode decreases. This is because the more the area of the chip 107 increases, the more the dimensions of the bottom surface of the cavity resonator formed by the space sandwiched between the GND plane 73 on the front surface of the chip 107 and the base 102 increases. Therefore, even if the sample holder 101 in which the cavity 105 is formed in the base 102 as shown in FIGS. 7A to 7C is used, it is predicted that the more the area of the chip 107 increases, the more the resonance frequency of the chip mode decreases and the more the influence on the quantum circuit increases. From the above, it is required to develop a technology capable of further making the resonance frequency of the chip mode as high as possible as compared with the case of using the sample holder 101 in which the cavity 105 is formed on the base 102.

The example embodiments capable of further increasing the resonance frequency of the chip mode will be described.

First Example Embodiment

In the first example embodiment, an example in which a PCB in contact with a base includes a dielectric, a front-surface GND that is formed on a front surface of the dielectric, a back-surface GND that is formed on a back surface of the dielectric, a through hole that penetrates from the front-surface GND to the back-surface GND, the through hole in which a chip is disposed, and a conductor that electrically connects the front-surface GND and the back-surface GND on an end face of the through hole will be described. Then, in the first example embodiment, an example in which there is a cavity in at least a part of the base below the through hole, and there is a support structure that supports the surface of the chip and is conducted to the base in the cavity will be described.

FIG. 9 is an explanatory diagram showing the sample holder according to the first example embodiment. A sample holder 1 of the first example embodiment has a configuration in which a PCB 3 is placed on a metal base 2 as shown in FIG. 9. A through hole 4 penetrating the PCB 3 is provided near the center of the PCB 3. The shape of the base 2 is not particularly limited. Examples of the shape of the base 2 include a rectangular parallelepiped and a cube. The sample holder 1 has a cavity 5 in a section of the base 2 immediately below the through hole 4 of the PCB 3.

By aligning the height of the circuit surface of the chip and the height of the surface of the PCB 3 as much as possible, it is possible to facilitate wire bonding, and it is possible to shorten the bonding wire. The shorter the bonding wire is, the better the electrical characteristics become. By forming the through hole 4 in the PCB 3, it is possible to increase the resonance frequency of the chip mode. If a dielectric or a conductor exists on the back surface of the chip, the resonance frequency of the chip mode decreases. The back surface of the chip is the surface opposite to the circuit surface. Therefore, in order to increase the resonance frequency of the chip mode, the back surface of the chip is brought into contact with vacuum as much as possible. If the chip is disposed on the PCB 3 without forming the through hole 4 in the PCB 3, the dielectric or the conductor of the PCB 3 comes into contact with the back surface of the chip, and therefore the resonance frequency of the chip mode cannot be increased. Therefore, the first example embodiment has a structure in which the largest possible area of the back surface of the chip is in contact with the vacuum by forming the through hole 4 in the PCB 3, disposing the chip in the through hole 4, and forming the cavity 5 in the base 2 immediately below the chip.

FIGS. 10A to 10C show enlarged views of the sample holder 1 of the first example embodiment near the through hole 4 of the PCB 3. FIG. 10A is a perspective view showing the sample holder 1 of the first example embodiment. FIG. 10B is a top view of the sample holder 1 of the first example embodiment. FIG. 10C is an end view in which the sample holder 1 of the first example embodiment is cut with a plane parallel to the xz plane including the cutting line C-CC shown in FIG. 10B. In FIG. 10C, a chip 7 is mounted with a bonding wire 13 on the sample holder 1 of the first example embodiment.

The sample holder 1 has the cavity 5 in at least a part of the base 2 below the through hole 4. In FIGS. 10A to 10C, the sample holder 1 has the cavity 5 in a section of the base 2 immediately below the through hole 4 of the PCB 3. In other words, in FIGS. 10A to 10C, the sample holder 1 has the cavity 5 in a section of the base 2 immediately below the chip 7 when the chip 7 is mounted on the sample holder 1 with the bonding wire 13. The shape of the cavity 5 is not particularly limited. For example, the bottom surface of the cavity 5 may be a flat surface or may be a surface other than a flat surface. The side surface of the cavity 5 may be a flat surface or may be a surface other than a flat surface. For example, there may be a recess or the like on the side surface of the cavity 5 or the bottom surface of the cavity 5. In FIGS. 10A to 10C, the cavity 5 has the shape of a quadrangular prism. More specifically, in FIGS. 10A to 10C, the cavity 5 has a quadrangular bottom surface where the lengths of the sides are a and b, and the cavity 5 has a quadrangular prism shape where the height is d. The cavity 5 has a support structure that supports the surface of the chip 7 and is conducted to the base. The material of the support structure is, for example, metal. Specifically, the material of the support structure may be, for example, a mixture containing metal such as a resin mixed with metal particles or a filler.

The shape of the support structure is not particularly limited. For example, in FIGS. 10A to 10C, the support structure may be a column 6. Although not illustrated, the support structure may be, for example, a protrusion extending from the side surface of the cavity 5. Alternatively, although not illustrated, the support structure may be three support points that are not linear, for example. Alternatively, although not illustrated, the support structure may be a structure extending from the bottom surface of the cavity 5 like a spiky frog.

Here, the column 6 shown in FIGS. 10A to 10C will be described as an example of the support structure. The number of the columns 6 and the shape of the columns 6 are not particularly limited. The same is true for the following example embodiments. In FIGS. 10A to 10C, a plurality of the columns 6 are provided in the cavity 5. More specifically, the columns 6 that are conductors are arranged at the four corners of the cavity 5.

In FIGS. 10A to 10C, in order to clearly show the columns 6, the columns 6 are indicated in a pattern different from that of the base 2. The cavity 5 in FIGS. 10A to 10C has the same structure as that of the cavity 105 in FIGS. 7A to 7C. That is, the bottom surfaces of the columns 6 at the four corners have a shape of an isosceles right triangle. The length of equal two sides (equal sides) of the bottom surface of the column 6 is s. The height of the column 6 is d. The columns 6 of the conductors at the four corners are in electrical contact with the base 2. The four conductor columns 6 shown in FIGS. 10A to 10C may be separate from the base 2. Alternatively, the columns 6 shown in FIGS. 10A to 10C may be made of the same material as that of the base 2. That is, the base 2 and the columns 6 may be integrated. When the chip 7 is mounted on the sample holder 1 with the bonding wire 13, the upper bottom surfaces of the columns 6 at the four corners come into contact with the back surface of the chip 7.

Here, effects of use of the column 6 will be described. If there is no column 6, there is a concern that the chip 7 falls in the cavity 5. The chip 7 and the PCB 3 are connected by the bonding wire. Therefore, there is a possibility that the chip 7 does not fall in the cavity 5 even without the column 6, but there is a concern that the chip 7 falls in the cavity 5 due to vibration or the like, or the chip 7 falls in the cavity 5 due to detachment of some of the bonding wires. Therefore, by providing the metal column 6, it is possible to prevent the chip 7 from falling in the cavity 5 and prevent the bonding wire from being detached. The metal column 6 can strengthen the thermal path between the chip 7 and the base 2. The chip 7 of the superconducting quantum circuit is cooled to about 10 [mK] (milli-Kelvin) by a cryocooler and operated. In general, the base 2 is in thermal contact with a cold stage of the cryocooler. The cold stage of the cryocooler is the coldest place of the cryocooler. That is, the base 2 has a very low temperature. The stronger the thermal path between the base 2 and the chip 7 is, in other words, the smaller the thermal resistance between the base 2 and the chip 7 is, the more the chip 7 is cooled. If the chip 7 is not cooled well, good performance of the quantum circuit formed in the chip 7 cannot be obtained, and thus it is desirable to cool the chip 7 to a temperature as low as possible. Therefore, the thermal resistance between the base 2 and the chip 7 is preferably as small as possible. The metal column 6 can reduce the thermal resistance between the base 2 and the chip 7.

A structure is conceivable in which no cavity 5 is formed in the base 2 in order to most strengthen the thermal path between the chip 7 and the base 2, for example. However, when the cavity 5 is not formed in the base 2, there is a problem of chip mode. Therefore, when the cavity 5 is formed in the base 2 in order to solve the problem of chip mode, a part of the upper surface of the column 6 is make parallel to the back surface of the chip 7. That is, at least a part of the section supporting the chip 7 in the support structure is parallel to the back surface of the chip 7. This makes it possible to reduce the thermal resistance.

FIG. 11A is a top view of the PCB 3 used in the sample holder 1 of the first example embodiment. FIG. 11B is a bottom view of the PCB 3 used in the sample holder 1 of the first example embodiment. FIG. 11C is a side view of the PCB 3 used in the sample holder 1 of the first example embodiment. FIG. 11D is a perspective view of the PCB 3 used in the sample holder 1 of the first example embodiment. FIG. 11E is an enlarged view of the PCB 3 used in the sample holder 1 of the first example embodiment near the through hole 4.

As shown in FIGS. 11A and 11E, the PCB 3 has a plate-shaped dielectric 8 extending parallel to the xy plane, for example. The PCB 3 has a structure in which a front-surface GND 9 and a core wire 10 of the coplanar waveguide are formed on one surface (front surface) of the dielectric 8. The PCB 3 has a structure in which a back-surface GND 11 is formed on the other surface (back surface) of the dielectric 8. The core wire 10, the front-surface GND 9, and the back-surface GND 11 are conductors that is, for example, metals. Examples of the metal include copper (Cu) and Cu plated with gold plating (Au plating). In FIG. 11A, eight coplanar waveguides are formed on the PCB 3. The coplanar waveguide is as described in FIG. 2A. However, the number of the coplanar waveguides formed on the PCB 3 is not particularly limited, and may be any number. As shown in FIG. 11D, the PCB 3 is provided with a plurality of through holes 12. These through holes 12 penetrate the dielectric 8 and electrically connect the front-surface GND 9 and the back-surface GND 11. The through hole 12 is produced, for example, by forming a hole that penetrates the dielectric 8, the front-surface GND 9, and the back-surface GND 11 and then plating the inside of the hole with metal.

In FIG. 9, the back-surface GND 11 of the PCB 3 is in contact with the base 2. Therefore, the metal base 2, the back-surface GND 11 of the PCB 3, the through hole 12 of the PCB 3, and the front-surface GND 9 of the PCB 3 are electrically connected. The through hole 4 is provided near the center of the PCB 3. This through hole 4 may have, for example, the same shape as that of the chip 7 of the superconducting quantum circuit mounted on the sample holder 1, that is, a rectangular shape or a square shape. In order to allow the chip 7 to enter the inside of the through hole 4, the area of the through hole 4 is larger than the area of the chip 7.

The PCB 3 used in the sample holder 1 of the first example embodiment has a conductor that conducts the front-surface GND 9 and the back-surface GND 11 on the end face of the through hole 4. In FIG. 11E, this conductor is a conductor 14. More specifically, the characteristic of the PCB 3 used in the sample holder 1 of the first example embodiment is that the front-surface GND 9 and the back-surface GND 11 of the PCB 3 are electrically connected by forming the conductor 14 on the end face of the through hole 4 in the through hole 4 of the PCB 3 as shown in FIG. 11E. That is, the conductor 14 is not formed on the end face of the PCB 3 in the vicinity of the core wire 10 of the PCB 3. Therefore, the conductor 14 is provided in a part of the end face of the through hole 4 other than the end face of the PCB 3 in the vicinity of the core wire 10. This prevents the core wire 10 of the PCB 3 and each GND of the PCB 3 from being electrically contacted. The conductor 14 formed on the end face of the through hole 4 is, for example, metal. More specifically, the conductor 14 is Cu, Cu plated with Au, or the like. As the conductor 14, a material that becomes a superconductor in a cryogenic environment of about 10 [mK] where the superconducting quantum circuit is operated, for example, lead (Pb) or the like, may be used.

FIG. 12 shows a simulation result of S11 of the system in which the chip 7 is mounted with the bonding wire 13 on the sample holder 1 of the first example embodiment shown in FIG. 9. Here, as described above, S11 is reflection to Port 1 in a case where a high-frequency signal is input from Port 1 shown in FIG. 11A. FIG. 12 is an explanatory diagram showing a simulation result of S11 in a case where the chip 7 is mounted with the bonding wire 13 on the sample holder 1 according to the first example embodiment. In the simulation in FIG. 12, a=5 [mm], b=5 [mm], d=3 [mm], and s=1 [mm].

As shown in FIG. 12, the lowest resonance frequency of the chip mode is 36.6 [GHz]. Therefore, as in FIG. 12, the lowest resonance frequency of the chip mode can be made higher than that in the simulation result shown in FIG. 8 where the simulation is performed using the sample holder 101 shown in FIGS. 7A to 7C. The reason why the resonance frequency of the chip mode can be further increased by using the sample holder 1 of the first example embodiment is considered to be as follows. In the example of the sample holder 101 shown in FIGS. 7A to 7C, the electric field of the standing wave generated when resonance of the chip mode occurs does not remain in the silicon substrate of the chip 107 and spreads to the inside of the dielectric 108 through the end face of the through hole 104 of the PCB 103. On the other hand, in the case of the sample holder 1 of the first example embodiment, since the conductor 14 is formed on the end face of the through hole 4 of the PCB 3 to electrically connect the front-surface GND 9 and the back-surface GND 11 of the PCB 3, it is possible to suppress the electric field of the standing wave generated when resonance in the chip mode occurs from spreading to the inside of the dielectric 8 of the PCB 3. Therefore, it is considered that according to the first example embodiment, the dimensions of the cavity resonator can be substantially reduced.

In the first example embodiment, assume that the chip 7 mounted on the sample holder 1, for example, has a rectangular shape, and the length of the short side of the chip 7 is v and the length of the long side of the chip 7 is w. In such a case, in the cavity 5 shown in FIGS. 10A to 10C, it is preferable that a<b, for example, a is v or more, and b is w or more. It is because otherwise, the contact area between the back surface of the chip 7 and the base 2 increases, and the resonance frequency of the chip mode decreases.

In this case, the shape of the through hole 4 of the PCB 3 of the first example embodiment is not particularly limited, but is more preferably rectangular. As shown in FIGS. 11A and 11B, when the length of the short side of the through hole 4 of the PCB 3 is x1 and the length of the long side of the through hole 4 is y1, the chip 7 needs to enter the inside of the through hole 4. Therefore, it is necessary to satisfy v<x1 and w<y1. The shorter x1 and y1 are, the smaller the substantial dimensions of the cavity resonator can be made, and therefore the resonance frequency of the chip mode can be increased. Thus, x1 is 1.2 v or less, and more preferably 1.1 v or less. For the same reason, b is preferably 1.2 w or less, and more preferably 1.1 w or less.

On the other hand, when the chip 7 has a square shape and the length of one side of the chip 7 is v, it is preferable that a=b, and it is preferable that a is v or more in the cavity 5 shown in FIGS. 10A to 10C. In this case, the through hole 4 of the PCB 3 according to the first example embodiment is preferably square. In a case where the length of one side of the through hole 4 of the PCB 3 is x1, the chip 7 needs to enter the inside of the through hole 4, and therefore v<x1 is required. Since the shorter x1 is, the higher the resonance frequency of the chip mode can be made, x1 is preferably 1.2 v or less, and more preferably 1.1 v or less.

According to the simulation, the larger the height d of the cavity 5 is made, the higher the resonance frequency of the chip mode becomes, but when d is increased to some extent, the resonance frequency of the chip mode hardly changes even if d is further increased. Therefore, in the first example embodiment, in a case where the thickness of the chip 7 mounted on the sample holder 1 is t, the height d of the cavity 5 shown in FIGS. 10A to 10C is preferably 2t or more, more preferably 3t or more, and still more preferably 5t or more.

In the first example embodiment, the smaller the bottom area of the columns 6 at the four corners shown in FIGS. 10A to 10C is, the more the contact area between the back surface of the chip 7 and the base 2 can be reduced, and therefore the resonance frequency of the chip mode can be increased. Therefore, in a case where the chip 7 mounted on the sample holder 1 is a rectangle and the length of the short side of the chip 7 is v, s is preferably 0.5v or less. Furthermore, s is preferably 0.3 v or less, and more preferably 0.2 v or less. On the other hand, when the chip 7 mounted on the sample holder 1 is a square and the length of one side of the chip 7 is v, s is preferably 0.5v or less. Furthermore, s is preferably 0.3 v or less, and more preferably 0.2 v or less.

Modification of First Example Embodiment

In the first example embodiment, the example in which the PCB 3 has two layers of metal layers has been described. The number of metal layer of the PCB 3 is not limited to two, and may be three or more. In the modification of the first example embodiment, a case where the number of metal layers of the PCB 3 is three or more will be described.

FIG. 13A is a top view showing the structure of the PCB 3 according to the modification of the first example embodiment. FIG. 13B is a cross-sectional view in which the PCB 3 according to the modification of the first example embodiment is cut with a plane parallel to the xy plane so that the core wire formed in the region sandwiched between the front-surface GND 9 and the back-surface GND 11 is visible. The cross-sectional view shown in FIG. 13B is a cross-sectional view of the PCB 3 cut near a plane parallel to the xy plane including a cutting line P-PP shown in FIG. 13C. FIG. 13C is an enlarged view of a cross section, near the core wire 10, of the PCB 3 according to the modification of the first example embodiment that is cut with a plane parallel to the xz plane including the cutting line D-DD shown in FIG. 13A. FIG. 13D is a bottom view showing the structure of the PCB 3 according to the modification of the first example embodiment. FIG. 13E is a perspective view of the PCB 3 according to the modification of the first example embodiment. FIG. 13F is an enlarged view of the PCB 3 according to the modification of the first example embodiment near the through hole 4. The sample holder 1 of the modification of the first example embodiment has a configuration in which the PCB 3 is placed on the metal base 2 as shown in FIG. 9. The base 2 is provided with the cavity 5 having a shape similar to that in FIGS. 10A to 10C. As described above, the PCB 3 of FIGS. 11A to 11E is used in the sample holder 1 of the first example embodiment. The PCB 3 of FIGS. 11A to 11E has two metal layers. Specifically, the PCB 3 in FIGS. 11A to 11E has a total of two metal layers of a metal layer in which the front-surface GND 9 and the core wire 10 are formed and a metal layer in which the back-surface GND 11 is formed. On the other hand, the modification of the first example embodiment uses the PCB 3 having three or more metal layers.

As shown in FIG. 13C, the PCB 3 has a structure in which the front-surface GND 9 is formed on one surface of the plate-shaped dielectric 8 extending parallel to the xy plane, for example. The PCB 3 has a structure in which the back-surface GND 11 is formed on the other surface of the dielectric 8. The PCB 3 has a structure in which the core wire 10 is formed inside the dielectric 8, that is, in a region sandwiched between the front-surface GND 9 and the back-surface GND 11. A line having such a structure is generally called a stripline.

As shown in FIG. 13A, the upper surface of the PCB 3 is provided with the front-surface GND 9, an input/output pad 15, and a bonding pad 16. The input/output pad 15 is a pad that connects the core wire 10 of the PCB 3 to an external measuring instrument or the like and is used for signal input/output. The bonding pad 16 is a pad for connecting the core wire 10 of the PCB 3 and the pad of the chip 7 with the bonding wire 13 or the like. The input/output pad 15 and the bonding pad 16 formed on the upper surface of the PCB 3 are electrically connected to the core wire 10 formed in the region sandwiched between the front-surface GND 9 and the back-surface GND 11. In the top view of FIG. 13A, the core wire 10 is invisible because it is hidden by the front-surface GND 9. On the other hand, FIG. 13B shows a cross-sectional view cut with a plane parallel to the xy plane near the core wire 10. In FIGS. 13A to 13F, four striplines are formed on the PCB 3. However, the number of striplines formed on the PCB 3 is not particularly limited, and may be any number. As shown in FIGS. 13B, 13C, and 13E, the PCB 3 is provided with a plurality of the through holes 12. These through holes 12 penetrate the dielectric 8 and electrically connect the front-surface GND 9 and the back-surface GND 11. The through hole 4 is provided near the center of the PCB 3. As shown in FIG. 13F, the front-surface GND 9 and the back-surface GND 11 of the PCB 3 are electrically connected by forming the conductor 14 on the end face of the through hole 4 in the through hole 4 of the PCB 3.

Even in the PCB 3 having three or more metal layers, as shown in FIG. 13F, by forming the conductor 14 on the end face of the through hole 4, the sample holder 1 in which the PCB 3 is placed on the base 2 same as that in FIGS. 10A to 10C achieves the same effect as that of the first example embodiment.

In the first example embodiment and the modification of the first example embodiment, the shape of the column 6 is a triangular prism having a bottom surface of an isosceles right triangle, but the shape of the column 6 need not be a triangular prism. The shape of the bottom surface of the column 6 may be polygonal such as a quadrangular prism, for example, or the bottom surface of the column need not be polygonal. The effects described in the first example embodiment and the modification of the first example embodiment are achieved regardless of the shape of the column.

Second Example Embodiment

The second example embodiment will be described in detail with reference to the drawings. Hereinafter, description of the content overlapping with the above description will be omitted to the extent that the description of the second example embodiment does not become unclear.

The sample holder 1 of the second example embodiment has a configuration in which the PCB 3 is placed on the base 2 as shown in FIG. 9 described in the first example embodiment. The cavity 5 having the same shape as the cavity 5 shown in FIGS. 10A to 10C is formed in the base 2.

FIG. 14 is an enlarged view of the PCB 3 used in the sample holder 1 of the second example embodiment near the through hole 4. The difference between the PCB 3 used in the first example embodiment and the PCB 3 used in the second example embodiment is as follows. In the PCB 3 described in the first example embodiment, the conductor 14 is formed on the end face of the through hole 4 of the PCB 3 as shown in FIG. 11E, but the conductor 14 is not formed on the end face of the PCB 3 near the core wire 10 of the PCB 3. This prevents the core wire 10 of the PCB 3 and the GND of the PCB 3 from being electrically contacted. On the other hand, in the PCB 3 of FIG. 14 used in the second example embodiment, due to the core wire 10 of the PCB 3 made slightly shorter than that in the first example embodiment, the core wire 10 of the PCB 3 is prevented from coming into contact with the end face of the through hole 4. That is, the core wire 10 of the PCB 3 is formed on the front surface of the dielectric in such a length not as to come into contact with the end face of the through hole 4. On the PCB 3, the conductor 14 is formed on the entire end face of the through hole 4 of the PCB 3. This electrically connects the front-surface GND 9 and the back-surface GND 11 of the PCB 3. Such a structure makes it possible to form the conductor 14 on the entire end face of the through hole 4 of the PCB 3 while preventing the core wire 10 of the PCB 3 and the GND of the PCB 3 from electrically contacting each other.

Here, effects of the second example embodiment will be described. The first example embodiment has an effect of suppressing the electric field of the standing wave generated when resonance of the chip mode occurs from spreading inside the dielectric 8 of the PCB 3. However, since the conductor 14 is not formed on the end face of the PCB 3 near the core wire 10 of the PCB 3, it is conceivable that a part of the electric field leaks inside the dielectric 8 of the PCB 3 through a section of the end face of the PCB 3 where the conductor 14 is not formed, that is, a section of the end face of the through hole 4 of the PCB 3 where the dielectric 8 is exposed. On the other hand, in the second example embodiment, since the conductor 14 is formed on the entire end face of the through hole 4 of the PCB 3, it is possible to further suppress the electric field of the standing wave generated when resonance in the chip mode occurs from spreading inside the dielectric 8 of the PCB 3 as compared with the first example embodiment. It is possible to further increase the resonance frequency in the chip mode.

FIG. 15 is an explanatory diagram showing a simulation result of S11 in a case where the chip 7 is mounted with the bonding wire 13 on the sample holder 1 of the second example embodiment. As shown in FIG. 15, the lowest resonance frequency of the chip mode can be increased to 36.8 [GHz] which is higher than that of the first example embodiment. Thus, the sample holder 1 of the second example embodiment has an effect that the resonance frequency of the chip mode can be made higher than that of the sample holder 1 of the first example embodiment.

Modification of Second Example Embodiment

The sample holder 1 of the modification of the second example embodiment has a configuration in which the PCB 3 is placed on the metal base 2 as shown in FIG. 9. The base 2 is provided with the cavity 5 having a shape similar to that of the example shown in FIGS. 10A to 10C. The modification of the second example embodiment uses the PCB 3 having three or more metal layers. As an example of the PCB 3 having three or more metal layers, a configuration example of the PCB 3 having three metal layers is shown in FIG. 16.

FIG. 16 is an enlarged view of the PCB 3 used in the sample holder 1 of the modification of the second example embodiment near the through hole 4; The difference between the PCB 3 (FIG. 13) described in the modification of the first example embodiment and the PCB 3 of FIG. 16 described in the modification of the second example embodiment is as follows. In the PCB 3 described in the modification of the first example embodiment, the conductor 14 is formed on the end face of the through hole 4 of the PCB 3 as shown in FIG. 13F, but the conductor 14 is not formed on the end face of the PCB 3 near bonding pad 16 of the PCB 3. This prevents the bonding pad 16 and the GND of the PCB 3 from being electrically contacted. On the other hand, in the PCB 3 of FIG. 16 used in the modification of the second example embodiment, by slightly separating the tip end of the bonding pad 16 from the through hole, the conductor 14 is formed on the entire end face of the through hole 4 of the PCB 3 so that the bonding pad 16 does not come into contact with the end face of the through hole 4, and the front-surface GND 9 and the back-surface GND 11 of the PCB 3 are electrically connected. Such a structure makes it possible to form the conductor 14 on the entire end face of the through hole 4 of the PCB 3 while preventing the bonding pad 16 and the GND of the PCB 3 from electrically contacting each other.

The modification of the first example embodiment has an effect of suppressing the electric field of the standing wave generated when resonance of the chip mode occurs from spreading inside the dielectric 8 of the PCB 3. However, since the conductor 14 is not formed on the end face of the PCB 3 near the bonding pad 16 of the PCB 3, it is conceivable that a part of the electric field leaks inside the dielectric 8 of the PCB 3 through a section of the end face of the PCB 3 where the conductor 14 is not formed, that is, a section of the end face of the through hole 4 of the PCB 3 where the dielectric 8 is exposed. On the other hand, in the modification of the second example embodiment, since the conductor 14 is formed on the entire end face of the through hole 4 of the PCB 3, it is expected that the electric field of the standing wave generated when resonance of the chip mode occurs can be further suppressed from spreading inside the dielectric 8 of the PCB 3 as compared with the modification of the first example embodiment, and the resonance frequency of the chip mode can be further increased.

As described above, even in the PCB 3 having three or more metal layers, as shown in FIG. 16, by forming the conductor 14 on the end face of the through hole 4, the sample holder 1 in which the PCB 3 is placed on the base 2 same as that in FIGS. 10A to 10C achieves the same effect as that of the second example embodiment.

In the second example embodiment and the modification of the second example embodiment, as described in the first example embodiment, the shape of the column 6 is a triangular prism having a bottom surface of an isosceles right triangle, but the shape of the column 6 need not be a triangular prism. The shape of the bottom surface of the column 6 may be polygonal such as a quadrangular prism, for example, or the bottom surface of the column 6 need not be polygonal. The effects described in the second example embodiment and the modification of the second example embodiment are achieved regardless of the shape of the column 6.

Third Example Embodiment

The third example embodiment will be described in detail with reference to the drawings. Hereinafter, description of the content overlapping with the above description will be omitted to the extent that the description of the third example embodiment does not become unclear. In the third example embodiment, as in the first example embodiment, the sample holder 1 includes the base 2 and the PCB 3 in contact with the base 2. In the third example embodiment, as in the first and second example embodiments, the PCB 3 has the through hole 4, the base 2 has the cavity 5 in at least a part below the through hole 4, and the cavity 5 has a support structure that supports the surface of the chip 7 and is conducted to the base 2. Here, the third example embodiment is characterized in that at least a part of the section that supports the chip 7 in the support structure is not parallel to the back surface of the chip 7.

FIG. 17A is a perspective view of the sample holder 1 according to the third example embodiment. FIG. 17B is a top view of the sample holder 1 according to the third example embodiment. FIG. 17C is an end view in which the sample holder 1 according to the third example embodiment is cut with a plane parallel to the xz plane including the cutting line E-EE shown in FIG. 17B. In FIG. 17C, the chip 7 is mounted on the sample holder 1.

The sample holder 1 according to the third example embodiment includes the base 2 and the PCB 3. That is, the sample holder 1 of the third example embodiment has a configuration in which the PCB 3 is placed on the metal base 2 as shown in FIG. 9. The third example embodiment uses the PCB 3 having the structure of FIG. 11 similarly to the first example embodiment and the second example embodiment. In the third example embodiment, the base 2 is provided with the cavity 5 having the structure as in FIGS. 17A to 17C. The PCB 3 has the through hole 4. At least a part of the base 2 below the through hole 4 has the cavity 5. As in the first example embodiment and the second example embodiment, the shape of the cavity 5 is not particularly limited. For example, the bottom surface of the cavity 5 may be a flat surface or may be a surface other than a flat surface. The side surface of the cavity 5 may be a flat surface or may be a surface other than a flat surface. For example, there may be a recess or the like on the side surface of the cavity 5 or the bottom surface of the cavity 5. In FIGS. 17A to 17C, the sample holder 1 has the cavity 5 in a section of the base 2 immediately below the through hole 4 of the PCB 3. In other words, in FIGS. 17A to 17C, the sample holder 1 has the cavity 5 in the section of the base 2 immediately below the chip 7 when the chip 7 is mounted on the sample holder 1 with the bonding wire 13. In FIGS. 17A to 17C, the cavity 5 has a quadrangular bottom surface where the lengths of the sides are a and b, and the cavity 5 has a quadrangular prism shape where the height is d.

The cavity 5 has a support structure that supports the surface of the chip 7 and is conducted to the base 2. The surface of the chip 7 here is the back surface of the chip 7 opposite to the circuit surface of the chip 7. As described above, as a feature of the third example embodiment, at least a part of the section that supports the chip 7 in the support structure is not parallel to the back surface of the chip 7. In the third example embodiment, as in the first example embodiment, the support structure is not particularly limited. Here, the support structure will be described by taking the column 6 as an example. An example in which the columns 6 are arranged at the four corners of the cavity 5 will be described. The lower bottom surface of the columns 6 at the four corners has the shape of an isosceles right triangle, the length of the equal two sides of this bottom surface is s, and the height of the columns 6 is d. The columns 6 of the conductors at the four corners are in electrical contact with the base 2. The four conductor columns 6 shown in FIGS. 17A to 17C may be separate from the base 2. Alternatively, the columns 6 may be made of the same material as that of the base 2, that is, the base 2 and the four columns 6 may be integrated.

As described above, the difference from the structure of the cavity 5 in the first example embodiment shown in FIGS. 10A to 10C is that, in the third example embodiment, at least a part of the upper surfaces of the columns 6 at the four corners, that is, the surface opposing the back surface of the chip 7 when the chip 7 is mounted on the sample holder 1, is not parallel to the back surface of the chip 7. In other words, at least a part of the upper surfaces of the columns 6 at the four corners is not parallel to the upper surface of the base 2. As shown in FIG. 17C, the column 6 used in the sample holder 1 of the third example embodiment has a structure in which an upper section 61 and a lower section 62 are connected. The shapes of the upper section 61 and the lower section 62 are not particularly limited. The lower section 62 has the shape of a triangular prism, the bottom surface of the lower section 62 has the shape of an isosceles right triangle, the length of the equal two sides of this bottom surface is s, and the height of the lower section 62 is d1. The upper section 61 has a triangular pyramid shape, the bottom surface of the upper section 61 has a shape of an isosceles right triangle, and the height of the upper section 61 is d2. Here, d1+d2=d. For example, the bottom surface of the upper section 61 and the bottom surface of the lower section 62 have the same shapes and dimensions. In this structure, when the chip 7 is mounted on the sample holder 1, at least a part of the columns 6 at the four corners comes into contact with the back surface of the chip 7. This structure makes it possible to reduce the contact area between the back surface of the chip 7 and the column 6 of the conductor as compared with the first example embodiment.

FIG. 18 shows a simulation result of S11 in a case where the chip 7 is mounted with the bonding wire 13 on the sample holder 1 of the third example embodiment. FIG. 18 is an explanatory diagram showing a simulation result of S11 according to the third example embodiment. In the simulation in FIG. 18, a=5 [mm], b=5 [mm], d=3 [mm], d1=2 [mm], d2=1 [mm], and s=1 [mm]. As shown in FIG. 18, the lowest resonance frequency of the chip mode can be increased to 37.5 [GHz], which is higher than that of the first example embodiment.

Thus, the sample holder 1 of the third example embodiment has an effect that the resonance frequency of the chip mode can be made higher than that of the sample holder 1 of the first example embodiment. In the case of the first example embodiment described above, the electric field of the standing wave generated when resonance of the chip mode occurs spreads mainly in the silicon substrate and in the cavity 5 (vacuum) provided in the base 2. However, in the part immediately above the columns 6 at the four corners, the space sandwiched between the GND plane 73 on the front surface of the chip 7 and the columns 6 is only silicon, and the electric field cannot spread in vacuum. Therefore, the effective permittivity is high in the section immediately above the columns 6 at the four corners. On the other hand, in the case of the third example embodiment, since at least a part of the upper surfaces of the columns 6 at the four corners is not parallel to the back surface of the chip 7, in the section immediately above the columns 6 at the four corners, the space sandwiched between the GND plane 73 on the front surface of the chip 7 and the columns 6 becomes silicon and vacuum, and therefore the electric field can also spread in vacuum in this section. For this reason, in the third example embodiment, since the effective permittivity in the section immediately above the columns 6 at the four corners becomes lower than that in the first example embodiment, it is considered that the resonance frequency of the chip mode can be further increased.

As another example of the third example embodiment, FIGS. 19A to 19C show a case where the thickness s of the columns 6 at the four corners is made larger than that in FIGS. 17A to 17C. FIG. 19A is a perspective view of the sample holder 1 according to the another example of the third example embodiment. FIG. 19B is a top view of the sample holder 1 according to the another example of the third example embodiment. FIG. 19C is an end view in which the sample holder according to the another example of the third example embodiment is cut with a plane parallel to the xz plane including the cutting line F-FF shown in FIG. 19B. In FIG. 19C, the chip 7 is mounted on the sample holder 1 according to another example of the third example embodiment.

FIG. 20 shows a simulation result of S11 in a case where the chip 7 is mounted with the bonding wire 13 on the sample holder 1 using the base 2 in which the cavity 5 of FIGS. 19A to 19C is formed.

FIG. 20 is an explanatory diagram showing a simulation result of S11 according to the another example of the third example embodiment. In the simulation, a=5 [mm], b=5 [mm], d=3 [mm], d1=0.5 [mm], d2=2.5 [mm], and s=2.5 [mm]. As shown in FIG. 20, the lowest resonance frequency of the chip mode can be further increased to 38.1 [GHz]. Thus, in the third example embodiment, the resonance frequency can be further increased by changing the thickness s of the columns 6 at the four corners, the height d1 of the lower section 62 and the height d2 of the upper section 61 of the column 6, the height d of the cavity 5, the thickness t of the chip 7, and the like.

Modification of Third Example Embodiment

In the modification of the third example embodiment, the upper surface of the upper section 61 of the columns 6 at the four corners of the cavity 5, that is, a part of the front surface opposing the back surface of the chip 7 when the chip 7 is mounted on the sample holder 1, is not parallel to the back surface of the chip 7, but a part is parallel to the back surface of the chip 7.

FIG. 21A is a perspective view of the sample holder 1 according to the modification of the third example embodiment. FIG. 21B is a top view of the sample holder 1 according to the modification of the third example embodiment. FIG. 21C is an end view in which the sample holder 1 according to the modification of the third example embodiment is cut with a plane parallel to the xz plane including the cutting line G-GG shown in FIG. 21B. In FIG. 21C, the chip 7 is mounted on the sample holder 1 according to the modification of the third example embodiment. In FIGS. 21A, 21B, and 21C, the upper surface of the upper section 61 of the columns 6 at the four corners of the cavity 5, that is, a part of the front surface opposing the back surface of the chip 7 of the surface of the base 2 forming the cavity 5 when the chip 7 is mounted on the sample holder 1, is not parallel to the back surface of the chip 7, but a part is parallel to the back surface of the chip 7. In other words, at least a part of the upper surface of the upper section 61 of the columns 6 at the four corners is not parallel to the upper surface of the base 2, but a part is parallel to the upper surface of the base 2. Similarly to the case of FIGS. 17A, 17B, and 17C and 19A, 19B, and 19C, the lower section 62 of the column 6 has a triangular prism shape, the bottom surface of the lower section 62 is an isosceles right triangle, and the length of the equal two sides is s1.

On the other hand, the upper section 61 of the column 6 has a triangular frustum shape. The lower bottom surface of the upper section 61 is an isosceles right triangle, and the length of the equal two sides is s1. The upper bottom surface of the upper section 61 is an isosceles right triangle, and the length of the equal two sides is s2. Here, s1>s2. The height of the lower section 62 of the column 6 is d1, and the height of the upper section 61 is d2. In this structure, when the chip 7 is mounted on the sample holder 1, at least a part of the columns 6 at the four corners comes into contact with the back surface of the chip 7. This structure makes it possible to reduce the contact area between the back surface of the chip 7 and the column 6 of the conductor as compared with the first example embodiment. However, the contact area between the back surface of the chip 7 and the column 6 of the conductor becomes larger than that in the case of FIGS. 17A to 17C and FIGS. 19A to 19C.

FIG. 22 is an explanatory diagram showing a simulation result of S11 in a case where the chip 7 is mounted with the bonding wire 13 on the sample holder 1 using the base 2 in which the cavity 5 is formed, shown in FIGS. 21A to 21C. In the simulation in FIG. 22, a=5 [mm], b=5 [mm], d=3 [mm], d1=2 [mm], d2=1 [mm], s1=1 [mm], and s2=0.5 [mm]. As shown in FIG. 22, the lowest resonance frequency of the chip mode is 37.5 [GHz]. This is a value substantially equal to the resonance frequency in the simulation results in the cases of FIGS. 17A to 17C described in the third example embodiment. As described above, the third example embodiment achieves the effect that the resonance frequency of the chip mode can be further increased even if a part of the upper surface of the upper section 61 of the columns 6 at the four corners is made parallel to the back surface of the chip 7.

In the third example embodiment and the modification of the third example embodiment, assume that the chip 7 mounted on the sample holder 1, for example, has a rectangular shape, and the length of the short side of the chip 7 is v and the length of the long side of the chip 7 is w. In such a case, in the cavity 5 shown in FIGS. 17A to 17C, the cavity 5 shown in FIGS. 19A to 19C, and the cavity 5 shown in FIGS. 21A to 21C, it is preferable that a<b, a is v or more, and b is w or more. In a case otherwise, there is a concern that the contact area between the back surface of the chip 7 and the base 2 increases, and the resonance frequency of the chip mode decreases. In this case, the through hole 4 of the PCB 3 used in the third example embodiment and the modification of the third example embodiment is preferably rectangular. When the length of the short side of the through hole 4 of the PCB 3 is x1 and the length of the long side of the through hole 4 is y1, it is necessary that v<x1 and w<y1 because the chip 7 needs to enter the inside of the through hole 4. Since the shorter x1 and y1 are, the higher the resonance frequency of the chip mode can be made, x1 is preferably 1.2 v or less, and more preferably 1.1 v or less. For the same reason, b is preferably 1.2 w or less, and more preferably 1.1 w or less.

On the other hand, when the chip 7 mounted on the sample holder 1 has a square shape and the length of one side of the chip 7 is v, a=b is preferable in the cavity 5 of FIGS. 17A to 17C, FIGS. 19A to 19C, and FIGS. 21A to 21C, and a is preferably v or more. In this case, the through hole 4 of the PCB 3 used in the third example embodiment and the modification of the third example embodiment is preferably square. In a case where the length of one side of the through hole 4 of the PCB 3 is x1, the chip 7 needs to enter the inside of the through hole 4, and therefore v<x1 is required. Since the shorter x1 is, the higher the resonance frequency of the chip mode can be made, x1 is preferably 1.2 v or less, and more preferably 1.1 v or less.

In the third example embodiment and the modification of the third example embodiment, in a case where the thickness of the chip 7 mounted on the sample holder 1 is t, the height d of the cavity 5 in FIGS. 17A to 17C, FIGS. 19A to 19C, and FIGS. 21A to 21C is preferably 2t or more, more preferably 3t or more, and still more preferably 5t or more.

In the third example embodiment, in a case where the chip 7 mounted on the sample holder 1 is a rectangle and the length of the short side of the chip 7 is v, s is preferably 0.1v or more and 0.5v or less. When the chip 7 mounted on the sample holder 1 is a square and the length of one side of the chip 7 is v, s is preferably 0.1v or more and 0.5v or less. Similarly, in the modification of the third example embodiment, in a case where the chip 7 mounted on the sample holder 1 is a rectangle and the length of the short side of the chip 7 is v, s1 is preferably 0.1v or more and 0.5v or less. When the chip 7 mounted on the sample holder 1 is a square and the length of one side of the chip 7 is v, s1 is preferably 0.1v or more and 0.5v or less. In the modification of the third exemplary example embodiment, s2 is only required to satisfy s2<s1.

In the third example embodiment and the modification of the third example embodiment, there is an effect of increasing the chip mode when d2 is larger than 0. Therefore, d2 is preferably larger than 0 and less than or equal to d. When d2=d, d1=0, and in this case, the column 6 includes only the upper section 61.

In the third example embodiment and the modification of the third example embodiment, the PCB 3 (FIGS. 11A to 11E) of the first example embodiment is used. The same effect can be achieved by using the sample holder 1 in which the PCB 3 (FIGS. 13A to 13F) of the modification of the first example embodiment, the PCB 3 (FIG. 14) of the second example embodiment, or the PCB 3 (FIG. 16) of the modification of the second example embodiment is placed on the base 2 in which the cavity 5 shown in FIGS. 17A to 17C, 19A to 19C, and 21A to 21C is formed.

In the third example embodiment and the modification of the third example embodiment, the shape of the lower section 62 of the column 6 is a triangular prism having a bottom surface of an isosceles right triangle, and the shape of the upper section 61 is a triangular pyramid, but the shapes of the lower section 62 and the upper section 61 of the column 6 are not particularly limited. Unless at least a part of the upper surface of the upper section 61, that is, the surface of the upper section 61 opposing the back surface of the chip 7, is parallel to the back surface of the chip 7 or the upper surface of the base 2, the effects described in the third example embodiment and the modification of the third example embodiment are obtained.

Fourth Example Embodiment

The fourth example embodiment will be described in detail with reference to the drawings. Hereinafter, description of the content overlapping with the above description will be omitted to the extent that the description of the fourth example embodiment does not become unclear.

The sample holder 1 of the fourth example embodiment has a configuration in which the PCB 3 is placed on the metal base 2 as shown in FIG. 9. In the fourth example embodiment, similarly to the first example embodiment, the PCB 3 shown in FIGS. 11A to 11E is used. In the fourth example embodiment, the sample holder 1 has the cavity 5 in a section of the base 2 immediately below the through hole 4 of the PCB 3. In other words, the sample holder 1 has the cavity 5 in a section of the base 2 immediately below the chip 7 when the chip 7 is mounted on the sample holder 1. In the fourth example embodiment, the cavity 5 has a shape in which the column and the frustum are combined, and the bottom surface having the narrower area of the frustum and the upper bottom surface of the column have the same shape. For example, the bottom surface of the frustum having the larger area is the through hole 4 side. As an example of the frustum of the cavity 5, a prismoid will be described as an example. As an example of the column of the cavity 5, a prism will be described as an example.

The sample holder 1 according to the fourth example embodiment is shown in FIGS. 23A to 23C. FIG. 23A is a perspective view of the sample holder 1 according to the fourth example embodiment. FIG. 23B is a top view of the sample holder 1 according to the fourth example embodiment. FIG. 23C is an end view in which the sample holder 1 according to the fourth example embodiment is cut with a plane parallel to the xz plane including the cutting line H-HH shown in FIG. 23B. In FIG. 23C, the chip 7 is mounted with the bonding wire 13 on the sample holder 1 according to the fourth example embodiment.

As shown in FIGS. 23B and 23C, the cavity 5 formed in the base 2 in the fourth example embodiment has a structure in which a prismatic section 51, which is a prism, and a prismoid section 52, which is a prismoid, are connected. In FIGS. 23B and 23C, the bottom surface of the prismatic section 51 and the bottom surface of the prismoid section 52 having the smaller area are connected. Therefore, the bottom surface of the prismatic section 51 and the bottom surface of the prismoid section 52 having the smaller area have the same shape and the same area.

In FIGS. 23A to 23C, the prismatic section 51 has a quadrangular bottom surface whose sides have the lengths a1 and b1 and a quadrangular prism shape having the height d1. In FIGS. 23A to 23C, the prismoid section 52 is a quadrangular prismoid.

Here, for example, lengths of sides of the chip and the prismatic section 51 in a case where the chip 7 mounted on the sample holder 1 has a rectangular shape will be described. In a case where the length of the short side of the chip 7 is v and the length of the long side of the chip 7 is w, it is preferable that a1<b1 in the prismatic section 51, and a1 is smaller than v and b1 is smaller than w.

On the other hand, when the chip 7 mounted on the sample holder 1 has a square shape and the length of one side of the chip 7 is v, a1=b1 is preferable in the prismatic section 51, and a1 is preferably smaller than v.

In FIGS. 23A to 23C, in the prismoid section 52, the bottom surface of the two bottom surfaces that has the smaller area has a quadrangular shape in which the lengths of the sides are a1 and b1. In FIGS. 23A to 23C, the bottom surface having the larger area of the prismoid section 52 has a quadrangular shape in which the lengths of the sides are a2 and b2.

Here, assume that the chip 7 mounted on the sample holder 1, for example, has a rectangular shape, and the length of the short side of the chip 7 is v and the length of the long side of the chip 7 is w. In such a case, it is preferable that a2<b2 in the prismoid section 52, a2 is v or more and 1.5v or less, and b2 is w or more and 1.5 w or less.

On the other hand, when the chip 7 mounted on the sample holder 1 has a square shape and the length of one side of the chip 7 is v, a2=b2 is preferable in the prismoid section 52, and a2 is preferably v or more and 1.5v or less. The height of the prismoid section 52 is d2. The cavity 5 formed in the base 2 of the sample holder 1 of the present example embodiment has a structure in which the prismoid section 52 is connected above the prismatic section 51, and the upper bottom surface of the prismatic section 51 and the lower bottom surface of the prismoid section 52 are the same plane. Here, the lower bottom surface of the prismoid section 52 is a bottom surface having the smaller area of the two bottom surfaces of the prismoid section 52.

A feature of the sample holder 1 of the fourth example embodiment is that the prismoid section 52 is provided on the upper side of the cavity 5, so that at least a part of the surface of the base 2 opposing the back surface of the chip 7 when the chip 7 is mounted on the sample holder 1 is made not parallel to the back surface of the chip 7. In FIGS. 23A to 23C, this part refers to the side surface of the prismoid section 52. As shown in FIG. 23C, the angle formed by a part not parallel to the back surface of the chip 7 in the side surface of the prismoid section 52, that is, the surface opposing the back surface of the chip 7 when the chip 7 is mounted on the sample holder 1 and the back surface of the chip 7 is θ. In other words, the angle formed by the side surface of the prismoid section 52 and the upper surface of the base 2 is defined as θ. θ is a range in which a part not parallel to the back surface of the chip 7 is formed on the side surface of the prismoid section 52. For example, θ is less than 90 degrees. In the structure of the sample holder 1 of the fourth example embodiment, when the chip 7 is mounted on the sample holder 1, at least a part of the base 2 comes into contact with the back surface of the chip 7. This structure makes it possible to reduce the contact area between the back surface of the chip 7 and the base 2 as compared with the first example embodiment.

FIG. 24 is an explanatory diagram showing a simulation result of S11 in a case where the chip 7 is mounted with the bonding wire 13 on the sample holder 1 according to the fourth example embodiment. In the simulation in FIG. 24, a1=4 [mm], b1=4 [mm], d1=2.5 [mm], a2=5 [mm], b2=5 [mm], and d2=0.5 [mm]. In this case, θ is 45 degrees. As shown in FIG. 24, the lowest resonance frequency of the chip mode can be increased to 38.6 [GHz], which is higher than that of the first example embodiment.

Thus, the sample holder 1 of the fourth example embodiment has an effect that the resonance frequency of the chip mode can be made higher than that of the sample holder 1 of the first example embodiment. The reason why the resonance frequency of the chip mode can be made higher in the fourth example embodiment than that of the first example embodiment will be described. In the case of the first example embodiment, the electric field of the standing wave generated when resonance of the chip mode occurs spreads mainly in the silicon substrate and in the cavity 5 (vacuum) provided in the base 2. However, in the case of the first example embodiment, in the section immediately above the columns 6 at the four corners, in other words, the section of the four corners of the chip 7, the space sandwiched between the GND plane 73 on the front surface of the chip 7 and the columns 6 is only silicon, and the electric field cannot spread in vacuum. Therefore, in the case of the first example embodiment, the effective permittivity is high at the four corners of the chip 7. On the other hand, in the case of the fourth example embodiment, since the prismoid section 52 is provided in the cavity 5, also in the section of the four corners of the chip 7, the space sandwiched between the GND plane 73 on the front surface of the chip 7 and the base 2 becomes silicon and vacuum, and therefore the electric field can also spread in vacuum in this section. For this reason, in the fourth example embodiment, since the effective permittivity in the section at the four corners of the chip 7 becomes lower than that in the first example embodiment, it is considered that the resonance frequency of the chip mode can be further increased.

Modification of Fourth Example Embodiment

As a modification of the fourth example embodiment, FIGS. 25A to 25C show the sample holder 1 in a case where the prismatic section 51 of the cavity 5 is eliminated and only the prismoid section 52 is provided. FIG. 25A is a perspective view of the sample holder 1 according to the modification of the fourth example embodiment. FIG. 25B is a top view of the sample holder 1 according to the modification of the fourth example embodiment. FIG. 25C is an end view in which the sample holder 1 according to the modification of the fourth example embodiment is cut with a plane parallel to the xz plane including the cutting line I-II shown in FIG. 25B. In FIG. 25C, the chip 7 according to the modification of the fourth example embodiment is mounted with the bonding wire 13. As shown in FIGS. 25A to 25C, the cavity 5 does not have the prismatic section 51 but has the prismoid section 52. In FIGS. 25A to 25C, the prismoid section 52 is a quadrangular prismoid. θ is a range in which the side surface of the prismoid section 52 becomes not parallel to the back surface of the chip 7. For example, when the prismoid section 52 is a quadrangular prismoid, θ is less than 90 degrees.

FIG. 26 is an explanatory diagram showing a simulation result of S11 in a case where the chip 7 is mounted with the bonding wire 13 on the sample holder 1 using the base 2 in which the cavity 5 is formed, shown in FIGS. 25A to 25C. In the simulation in FIG. 26, a1=2 [mm], b1=2 [mm], a2=5 [mm], b2=5 [mm], d1=0 [mm], and d2=5 [mm]. In this case, θ is about 73.3 degrees. As shown in FIG. 26, the lowest resonance frequency of the chip mode can be further increased to 39.0 [GHz]. Thus, in the fourth example embodiment, the resonance frequency can be further increased by changing the dimensions a1, b1, d1, a2, b2, and d2 of the prismatic section 51 and the prismoid section 52 of the cavity 5, the thickness t of the chip 7, and the like.

In the fourth example embodiment and the modification of the fourth example embodiment, in a case where the thickness of the chip 7 mounted on the sample holder 1 is t, the height d1+d2 of the cavity 5 in FIGS. 23A to 23C and FIGS. 25A to 25C is preferably 2t or more, more preferably 3t or more, and still more preferably 5t or more.

In the fourth example embodiment and the modification of the fourth example embodiment, there is an effect of increasing the chip mode when d2 is larger than 0. Therefore, d2 is preferably greater than 0. On the other hand, d1 may be 0, and thus d2 is preferably 0 or more. When d1=0, the cavity 5 includes only the prismoid section 52.

In the fourth example embodiment and the modification of the fourth example embodiment, the PCB 3 (FIGS. 11A to 11E) of the first example embodiment is used. The same effect can be achieved by using the sample holder 1 in which the PCB 3 (FIGS. 13A to 13F) of the modification of the first example embodiment, the PCB 3 (FIG. 14) of the second example embodiment, or the PCB 3 (FIG. 16) of the modification of the second example embodiment is placed on the base 2 in which the cavity 5 shown in FIGS. 23A to 23C and 25A to 25C is formed.

In the fourth example embodiment and the modification of the fourth example embodiment, the cavity 5 has a structure in which the prismatic section 51 and the prismoid section 52 are connected or a structure including only the prismoid section 52, but the prismoid section 52 need not have a prismoid shape. For example, the side surface of the prismoid section 52 may be a curved surface instead of a plane. That is, unless at least a part of the front surface of the base 2 forming the cavity 5 opposing the back surface of the chip 7 is parallel to the back surface of the chip 7 or the upper surface of the base 2, the effects described in the fourth example embodiment and the modification of the fourth example embodiment are obtained. Instead of the prismoid shape of the prismoid section 52, a pyramid shape may be used. Therefore, the cavity 5 may have a structure in which the prismatic section 51 and a pyramid section are connected or a structure including only the pyramid section.

Fifth Example Embodiment

The fifth example embodiment will be described in detail with reference to the drawings. Hereinafter, description of the content overlapping with the above description will be omitted to the extent that the description of the fifth example embodiment does not become unclear.

The sample holder 1 of the fifth example embodiment has a configuration in which the PCB 3 is placed on the metal base 2 as shown in FIG. 9. The fifth example embodiment uses the PCB 3 having the structure shown in FIGS. 11A to 11E similarly to that of the first example embodiment. In the fifth example embodiment, the sample holder 1 has the cavity 5 in a section of the base 2 immediately below the through hole 4 of the PCB 3, in other words, in a section immediately below the chip 7 when the chip 7 is mounted on the sample holder 1. Similarly to the fourth example embodiment, the cavity 5 has a shape in which the prism and the prismoid are combined, and has a shape in which the bottom surface having the narrower area of the prismoid and the upper bottom surface of the prism are connected. In the fifth example embodiment, unlike the fourth example embodiment, a prismoid may be deformed. Due to this, in the fifth example embodiment, when the chip 7 is mounted on the sample holder 1, at least a part of the front surface opposing the back surface of the chip 7 of the surface of the base 2 forming the cavity 5 is not parallel to the back surface of the chip 7.

FIG. 27A is a perspective view of the sample holder 1 of the fifth example embodiment. FIG. 27B is a top view of the sample holder 1 of the fifth example embodiment. FIG. 27C is a cross-sectional view in which the sample holder of the fifth example embodiment is cut with a plane parallel to the xz plane including the cutting line J-JJ shown in FIG. 27B. In FIG. 27C, the chip 7 is mounted with the bonding wire 13 on the sample holder 1 according to the fifth example embodiment. As shown in FIGS. 27A to 27C, the cavity 5 formed in the base 2 in the fifth example embodiment has a structure in which the prismatic section 51 and the prismoid deformation section 53 are connected.

The prismatic section 51 has a quadrangular bottom surface whose sides have the lengths a1 and b1 and a quadrangular prism shape having the height d1.

Here, assume that the chip 7 mounted on the sample holder 1, for example, has a rectangular shape, and the length of the short side of the chip 7 is v and the length of the long side of the chip 7 is w. In such a case, it is preferable that a1<b1 in the prismatic section 51, and a1 is smaller than v and b1 is smaller than w.

On the other hand, when the chip 7 mounted on the sample holder 1 has a square shape and the length of one side of the chip 7 is v, a1=b1 is preferable in the prismatic section 51, and a1 is preferably smaller than v.

In the prismoid deformation section 53, the bottom surface of the two bottom surfaces that has the smaller area has a quadrangular shape in which the lengths of the sides are a1 and b1, and the bottom surface having the larger area has an octagonal shape in which the four corners of the quadrangle in which the lengths of the sides are a2 and b2 are obliquely cut.

Here, assume that the chip 7 mounted on the sample holder 1, for example, has a rectangular shape, and the length of the short side of the chip 7 is v and the length of the long side of the chip 7 is w. In such a case, it is preferable that a2<b2 in the prismoid deformation section 53, a2 is v or more and 1.5v or less, and b2 is w or more and 1.5 w or less.

On the other hand, when the chip 7 mounted on the sample holder 1 has a square shape and the length of one side of the chip 7 is v, a2=b2 is preferable in the prismoid deformation section 53, and a2 is preferably v or more and 1.5v or less.

The height of the prismoid deformation section 53 is d2. The cavity 5 formed in the base 2 of the sample holder 1 of the present example embodiment has a structure in which the prismoid deformation section 53 is connected above the prismatic section 51, and the upper bottom surface of the prismatic section 51 and the lower bottom surface of the prismoid deformation section 53 are the same plane. Here, the lower bottom surface of the prismoid deformation section 53 is a bottom surface having the smaller area of the two bottom surfaces of the prismoid deformation section 53. The shape of the cavity 5 in FIGS. 27A to 27C of the fifth example embodiment will be described with reference to FIGS. 28A to 28C and FIGS. 29A to 29C for accurate description.

FIG. 28A is a perspective view showing the shape example 1 of the cavity 5 of the sample holder 1 of the fifth example embodiment. FIG. 28B is a top view showing the shape example 1 of the cavity 5 of the sample holder 1 of the fifth example embodiment. FIG. 28C is an end view in which in the example shape 1 of the cavity 5 of the sample holder 1 of the fifth example embodiment, the sample holder 1 is cut near the cavity 5 with a plane parallel to the xz plane including the cutting line K-KK shown in FIG. 28B. In FIG. 28C, the chip 7 is mounted with the bonding wire 13 on the sample holder 1 according to the fifth example embodiment.

FIG. 29A is a perspective view showing the shape example 2 of the cavity 5 of the sample holder 1 of the fifth example embodiment. FIG. 29B is a top view showing the shape example 2 of the cavity 5 of the sample holder 1 of the fifth example embodiment. FIG. 29C is a cross-sectional view in which the sample holder is cut with a plane parallel to the xz plane including a cutting line L-LL shown in FIG. 29B in the example shape 2 of the cavity of the sample holder 1 of the fifth example embodiment. In the cross-sectional view shown in FIG. 29C, there is no column 6 on the cut surface, but a pattern is provided to the column 6 in order to clearly show the columns 6. In FIG. 29C, the chip 7 is mounted with the bonding wire 13 on the sample holder 1 according to the fifth example embodiment.

The cavity 5 shown in FIGS. 28A to 28C has the same structure as that of the cavity 5 shown in FIGS. 23A to 23C of the fourth example embodiment. That is, the cavity 5 has a configuration in which the prismatic section 51 and the prismoid section 52 are connected. In the fifth example embodiment, four conductor columns 6 shown in FIGS. 29A to 29C are further added to the four corners of the cavity 5 shown in FIGS. 28A to 28C similar to the fourth example embodiment. Due to this, the cavity 5 having the structure shown in FIGS. 27A to 27C can be formed in the base 2. As shown in FIGS. 29A to 29C, in the present example embodiment, the conductor columns 6 at the four corners are triangular prisms, the bottom surface of the triangular prism has a shape of an isosceles right triangle, the length of the equal two sides of this bottom surface is s, and the height of the triangular prism is d1+d2. The columns 6 of the conductors at the four corners are in electrical contact with the base 2. The four conductor columns 6 shown in FIGS. 29A to 29C may be separate from the base 2, but may be made of the same material as that of the base 2, that is, the base 2 and the four columns 6 may be integrated.

A feature of the sample holder 1 of the fifth example embodiment is that the prismoid deformation section 53 is provided on the upper side of the cavity 5, so that at least a part of the front surface opposing the back surface of the chip 7 when the chip 7 is mounted on the sample holder 1 is made not parallel to the back surface of the chip 7. As shown in FIG. 27C, the angle formed by a part not parallel to the back surface of the chip 7 in the side surface of the prismoid deformation section 53, that is, the surface opposing the back surface of the chip 7 when the chip 7 is mounted on the sample holder 1 and the back surface of the chip 7 is θ. In other words, the angle formed by the side surface of the prismoid deformation section 53 and the upper surface of the base 2 is defined as θ. θ is a range in which the side surface of the prismoid deformation section 53 becomes not parallel to the back surface of the chip 7. For example, when the prismoid deformation section 53 is created based on the prismoid section 52, which is a quadrangular prismoid, θ is less than 90 degrees. In the structure of the sample holder 1 of the fifth example embodiment, when the chip 7 is mounted on the sample holder 1, at least a part of the base 2 comes into contact with the back surface of the chip 7.

FIG. 30 shows a simulation result of S11 in a case where the chip 7 is mounted with the bonding wire 13 on the sample holder 1 using the base 2 in which the cavity 5 of FIGS. 27A to 27C is formed. FIG. 30 is an explanatory diagram showing a simulation result of S11 of the system in which the chip 7 is mounted on the sample holder 1 of the fifth example embodiment with the bonding wire 13. In the simulation in FIG. 30, a1=3 [mm], b1=3 [mm], a2=5 [mm], b2=5 [mm], d1=1 [mm], d2=2 [mm], and s=1 [mm]. In this case, θ is about 63.4 degrees.

As shown in FIG. 30, the lowest resonance frequency of the chip mode can be increased to 37.4 [GHz], which is higher than that of the first example embodiment.

Thus, the sample holder 1 of the fifth example embodiment has an effect that the resonance frequency of the chip mode can be made higher than that of the sample holder 1 of the first example embodiment. In the sample holder 1 of FIGS. 27A to 27C of the fifth example embodiment, the upper surfaces of the columns 6 at the four corners are in contact with the back surface of the chip 7. In the simulation shown in FIG. 30, s=1 [mm]. In this case, the contact area where the upper surfaces of the columns 6 at the four corners and the back surface of the chip 7 are in contact with each other in the sample holder 1 of the present example embodiment is the same as the case analyzed in the simulation of FIG. 12 in the first example embodiment. In the simulation shown in FIG. 12, s=1 [mm]. The resonance frequency of the chip mode is 36.6 [GHz] in FIG. 12 for the first example embodiment, and the resonance frequency of the chip mode is 37.4 [GHz] in FIG. 30 for the fifth example embodiment. Therefore, the resonance frequency of the chip mode is higher in the fifth example embodiment than in the first example embodiment. The reason why the fifth example embodiment can make the resonance frequency of the chip mode higher than that of the first example embodiment is considered to be as follows. In the case of the fifth example embodiment, since the dimensions of the cavity 5 are smaller than the dimensions (a and b) of the cavity 5 in the first example embodiment, the resonance frequency of the cavity 5 itself is considered to become higher than that in the first example embodiment. Specifically, in the case of the fifth example embodiment, the dimensions of the cavity 5 immediately below the chip 7 decrease downward, and at the lowermost part of the cavity 5, the dimensions (a1 and b1) of the cavity 5 are smaller than those of the first example embodiment (a and b). It is considered that with such a structure, the resonance frequency of the cavity 5 itself becomes higher in the fifth example embodiment than in the first example embodiment. As a result, it is considered that even if the contact area between the back surface of the chip 7 and the column 6 is the same, an effect that the fifth example embodiment can make the resonance frequency of the chip mode higher than that of the first example embodiment.

Modification of Fifth Example Embodiment

As a modification of the fifth example embodiment, FIGS. 31A to 31C show a sample holder in a case where the prismatic section 51 of the cavity 5 is eliminated and only the prismoid deformation section 53 is provided. FIG. 31A is a perspective view of the sample holder 1 of the modification of the fifth example embodiment. FIG. 31B is a top view of the sample holder 1 of the modification of the fifth example embodiment. FIG. 31C is a cross-sectional view in which the sample holder of the modification of the fifth example embodiment is cut with a plane parallel to the xz plane including the cutting line M-MM shown in FIG. 31B. In FIG. 31C, the chip 7 is mounted with the bonding wire 13 on the sample holder 1 according to the fifth example embodiment. In order to describe the shape of the cavity 5 shown in FIGS. 31A, 31B, and 31C of the modification of the fifth example embodiment in more detail, a description will be given with reference to FIGS. 32A to 32C and FIGS. 33A to 33C.

FIG. 32A is a perspective view showing the shape example 1 of the cavity 5 of the sample holder 1 of the modification of the fifth example embodiment. FIG. 32B is a top view showing the shape example 1 of the cavity 5 of the sample holder 1 of the modification of the fifth example embodiment. FIG. 32C is an end view in which in the example shape 1 of the cavity 5 of the sample holder 1 of the modification of the fifth example embodiment, the sample holder 1 is cut near the cavity 5 with a plane parallel to the xz plane including the cutting line N-NN shown in FIG. 32B. In FIG. 32C, the chip 7 is mounted with the bonding wire 13 on the sample holder 1 according to the modification of the fifth example embodiment.

FIG. 33A is a perspective view showing the shape example 2 of the cavity 5 of the sample holder 1 of the modification of the fifth example embodiment. FIG. 33B is a top view showing the shape example 2 of the cavity 5 of the sample holder 1 of the modification of the fifth example embodiment. FIG. 33C is a cross-sectional view in which the sample holder is cut with a plane parallel to the xz plane including the cutting line O-OO shown in FIG. 33B in the example shape 2 of the cavity 5 of the sample holder 1 of the modification of the fifth example embodiment. In FIG. 33C, the chip 7 is mounted with the bonding wire 13 on the sample holder 1 according to the modification of the fifth example embodiment.

The cavity 5 shown in FIGS. 32A to 32C has the same structure as that of the cavity 5 in FIGS. 25A to 25C of the modification of the fourth example embodiment. That is, the cavity 5 shown in FIGS. 32A to 32C includes the prismoid section 52. In the modification of the fifth example embodiment, similarly to the modification of the fourth example embodiment, four conductor columns 6 shown in FIGS. 33A to 33C are further added to the four corners of the cavity 5 shown in FIGS. 32A to 32C. Due to this, the cavity 5 shown in FIGS. 31A to 31C can be formed in the base 2. θ is a range in which a part not parallel to the back surface of the chip 7 is formed on the side surface of the cavity 5 (prismoid section 52) shown in FIGS. 32A to 32C. For example, when the cavity 5 shown in FIGS. 32A to 32C is a quadrangular prismoid, θ is less than 90 degrees.

FIG. 34 shows a simulation result of S11 in a case where the chip 7 is mounted with the bonding wire 13 on the sample holder 1 using the base 2 in which the cavity 5 shown in FIGS. 31A to 31C is formed. FIG. 34 is an explanatory diagram showing a simulation result of S11 of the system in which the chip 7 is mounted with the bonding wire 13 on the sample holder 1 of the modification of the fifth example embodiment. In FIG. 34, in the simulation, a1=2 [mm], b1=2 [mm], a2=5 [mm], b2=5 [mm], d2=5 [mm], and s=1 [mm]. In this case, θ is about 73.3 degrees. As shown in FIG. 34, the lowest resonance frequency of the chip mode can be increased to 37.5 [GHz], which is higher than that of the first example embodiment. As described above, in the fifth example embodiment, the resonance frequency can be further increased by changing the dimensions a1, b1, d1, a2, b2, and d2 of the prismatic section 51 and the prismoid deformation section 53 of the cavity 5, the thickness t of the chip 7, and the like.

In the fifth example embodiment and the modification of the fifth example embodiment, the thickness of the chip 7 mounted on the sample holder 1 is t. In such a case, the sum (d1+d2) of the height d1 of the prismatic section 51 of the cavity 5 and the height d2 of the prismoid deformation section 53 in FIGS. 27A to 27C and FIGS. 31A to 31C is preferably 2t or more, more preferably 3t or more, and still more preferably 5t or more.

In the fifth example embodiment and the modification of the fifth example embodiment, there is an effect of increasing the chip mode when d2 is larger than 0. Therefore, d2 is preferably greater than 0. On the other hand, d1 may be 0, and thus d2 is preferably 0 or more. When d1=0, the cavity 5 includes only the prismoid deformation section 53.

In the fifth example embodiment and the modification of the fifth example embodiment, the smaller the bottom area of the columns 6 at the four corners in FIGS. 29A to 29C and FIGS. 33A to 33C is, the more the contact area between the back surface of the chip 7 and the base 2 can be reduced, and therefore the resonance frequency of the chip mode can be increased. Therefore, in a case where the chip 7 mounted on the sample holder 1 is a rectangle and the length of the short side of the chip 7 is v, s needs to be 0.5 v or less, preferably 0.3 v or less, and more preferably 0.2 v or less. On the other hand, when the chip 7 mounted on the sample holder 1 is a square and the length of one side of the chip 7 is v, s needs to be 0.5 v or less, preferably 0.3 v or less, and more preferably 0.2 v or less.

In the fifth example embodiment and the modification of the fifth example embodiment, the PCB 3 (FIGS. 11A to 11E) of the first example embodiment is used. The same effect can be achieved by using the sample holder 1 in which the PCB 3 (FIGS. 13A to 13F) of the modification of the first example embodiment, the PCB 3 (FIG. 14) of the second example embodiment, or the PCB 3 (FIG. 16) of the modification of the second example embodiment is placed on the base 2 in which the cavity 5 shown in FIGS. 27A to 27C and 31A to 31C is formed.

In the fifth example embodiment and the modification of the fifth example embodiment, the cavity 5 has a structure in which the prismatic section and the prismoid deformation section are connected or a structure including only the prismoid deformation section, but the shape of the cavity 5 may be another shape. For example, the side surface of the prismoid deformation section may be a curved surface instead of a plane. That is, unless at least a part of the front surface of the base 2 forming the cavity 5 opposing the back surface of the chip 7 is parallel to the back surface of the chip 7 or the upper surface of the base 2, the effects described in the fifth example embodiment and the modification of the fifth example embodiment are obtained.

Other Example Embodiments

In the first to fifth example embodiments and the modifications of the first to fifth example embodiments, as a mounting method of the chip 7 of the superconducting quantum circuit, the configuration in which the chip 7 is directly placed on the metal base 2 has been described, but the mounting method is not limited to this. For example, also in a case of a mounting form in which a resin material such as varnish is applied onto the metal base 2 and then the chip 7 is placed on the resin material such as varnish, it is possible to achieve the effect of the example embodiments, that is, the effect that the resonance frequency of the chip mode can be further increased.

In the first to fifth example embodiments and the modifications of the first to fifth example embodiments, the configuration in which the PCB 3 is directly placed on the metal base 2 has been described as the configuration of the sample holder 1. The effect of the example embodiments can also be achieved by the sample holder 1 having a configuration in which a sheet of metal such as indium (In) is placed on the metal base 2 and the PCB 3 is placed on the sheet of metal such as In. By sandwiching a sheet of soft metal such as In between the base 2 and the PCB 3, it is possible to make a gap less likely to occur between the back-surface GND 11 of the PCB 3 and the base 2. This sometimes improves high-frequency characteristics of the sample holder 1. Specifically, if there is a gap between the PCB 3 and the base 2, the gap can form a new cavity resonator and cause resonance when a signal of a specific frequency is input to the chip 7. Therefore, it is preferable that no gap is generated between the back-surface GND 11 of the PCB 3 and the base 2.

In the first to fifth example embodiments and the modifications of the first to fifth example embodiments, the configuration in which the PCB 3 is placed on the metal base 2 has been described as the configuration of the sample holder 1. A metal lid may be placed on the PCB 3. The effect of the example embodiments can also be achieved even if the lid is placed. In such the sample holder 1, the metal lid is in electrical contact with the front-surface GND 9 of the PCB 3. However, the lid does not come into contact with the core wire 10 of the PCB 3 and the chip 7. This is to prevent the core wire 10 of the PCB 3 and the circuit and wiring of the chip 7 from coming into contact with the GND. For the same reason as described above, it is preferable that no gap is generated between the lid and the front-surface GND 9 of the PCB 3, and therefore a sheet such as In may be sandwiched between the lid and the front-surface GND 9 of the PCB 3.

In the first to fifth example embodiments and the modifications of the first to fifth example embodiments, the case where the base 2 is a rectangular parallelepiped or a cube has been described as the shape of the sample holder 1, but the effect of the example embodiments can also be achieved if the base 2 has another shape such as a cylinder. Similarly, the effect of the example embodiments can also be achieved even if the shape of the PCB 3 is also a rectangular shape and a square shape but other shapes such as a circular shape.

Sixth Example Embodiment

In a sixth example embodiment, the basic configuration of the content described in the first to fifth example embodiments will be described. Here, the sixth example embodiment will be described with reference to FIGS. 9 and 11E used in the first example embodiment.

As shown in FIG. 9, the sample holder 1 includes the base 2 and the PCB 3 in contact with the base 2. As shown in FIG. 11E, the PCB 3 includes the dielectric 8, the front-surface GND 9 formed on the front surface of the dielectric 8, the back-surface GND 11 formed on the back surface of the dielectric 8, the through hole 4 penetrating from the front-surface GND 9 to the back-surface GND 11 in which the chip 7 is disposed, and the conductor 14 that conducts the front-surface GND 9 and the back-surface GND 11 to the end face of the through hole 4.

As shown in FIG. 9, the cavity 5 is provided in at least a part of the base 2 below the through hole 4. The shape of the cavity 5 is not particularly limited. For example, the bottom surface of the cavity 5 may be a flat surface or may be a surface other than a flat surface. The side surface of the cavity 5 may be a flat surface or may be a surface other than a flat surface. For example, there may be a recess or the like on the side surface of the cavity 5 or the bottom surface of the cavity 5.

Next, the cavity 5 has a support structure that supports the surface of the chip 7 and is conducted to the base 2. The shape of the support structure is not particularly limited. The support structure may be a column or the like. The support structure may be integrated with the base. Thus, the support structure may be formed by the shape of the cavity 5.

In the sixth example embodiment, the cavity 5 is formed in the base 2, and the conductor 14 that conducts the front-surface GND 9 and the back-surface GND 11 is provided on the end face of the through hole 4 of the PCB 3, whereby the resonance frequency of the chip mode can be further increased.

It has been requested to cause the resonance frequency of resonance that occurs by supplying a signal of a specific frequency to a chip in a case where the chip is mounted on the sample holder, higher than a technique described in B. Lienhard, et al., “Microwave Packaging for Superconducting Qubits,” arXiv: 1906.05425v1 [quant-ph] 12 Jun. 2019.

As above, in a case where a chip is mounted on the sample holder 1 according to the example embodiments, the resonance frequency of resonance that occurs when a signal of a specific frequency is input to the chip is further increased.

The description of the sample holder 1 according to the example embodiments is finished. The superconducting quantum computer according to the example embodiments includes the sample holder 1 according to the example embodiments and the chip on which the superconducting quantum circuit is formed is disposed in the sample holder 1.

The previous description of embodiments is provided to enable a person skilled in the art to make and use the present disclosure. Moreover, various modifications to these example embodiments will be readily apparent to those skilled in the art, and the generic principles and specific examples defined herein may be applied to other embodiments without the use of inventive faculty. Therefore, the present disclosure is not intended to be limited to the example embodiments described herein but is to be accorded the widest scope as defined by the limitations of the claims and equivalents.

Further, it is noted that the inventor's intent is to retain all equivalents of the claimed disclosure even if the claims are amended during prosecution.

SUPPLEMENTARY NOTE

Some or all of the above example embodiments can also be described as the following supplementary notes. However, some or all of the above example embodiments are not limited to the following.

(Supplementary Note 1)

A sample holder comprising:

-   -   a base; and     -   a PCB in contact with the base, the PCB comprising:         -   a dielectric,         -   a front-surface ground that is formed on a front surface of             the dielectric,         -   a back-surface ground that is formed on a back surface of             the dielectric,         -   a through hole that penetrates from the front-surface ground             to the back-surface ground, wherein a chip is disposed in             the through hole, and,         -   a conductor that electrically connects the front-surface             ground and the back-surface ground, wherein the conductor is             disposed on an end face of the through hole,     -   wherein at least a part of the base below the through hole has a         cavity,     -   a support structure supports a surface of the chip and is         electrically connected to the base, and     -   the support structure is disposed in the cavity.

(Supplementary Note 2)

The sample holder according to Supplementary Note 1, in which

-   -   at least a part of a section that supports the chip in the         support structure is parallel to the surface of the chip.

(Supplementary Note 3)

The sample holder according to Supplementary Note 1 or 2, in which

-   -   the support structure is a column.

(Supplementary Note 4)

The sample holder according to Supplementary Note 3, in which

-   -   the support structure is a plurality of columns provided in the         cavity.

(Supplementary Note 5)

The sample holder according to Supplementary Note 4, in which

-   -   the plurality of columns are provided at four corners of the         cavity.

(Supplementary Note 6)

The sample holder according to Supplementary Note 5, in which

-   -   when each of the plurality of columns is a triangular prism,     -   a length of an equal side of a surface of an isosceles triangle         of the triangular prism is shorter than a half of a length of a         short side of the surface of the chip.

(Supplementary Note 7)

The sample holder according to any of Supplementary Notes 1 to 6, in which

-   -   the PCB has a core wire of a coplanar waveguide on the front         surface of the dielectric.

(Supplementary Note 8)

The sample holder according to Supplementary Note 7, in which

-   -   the conductor is provided in an end face of the through hole in         a section other than an end face of the PCB in a vicinity of the         core wire.

(Supplementary Note 9)

The sample holder according to Supplementary Note 7, in which

-   -   the core wire has such a length not as to come into contact with         an end face of the through hole, and     -   the conductor is formed on an entire end face of the through         hole.

(Supplementary Note 10)

The sample holder according to any of Supplementary Notes 1 to 6, in which

-   -   the PCB further includes a core wire in the dielectric in a         region sandwiched between the front-surface ground and the         back-surface ground, and     -   the front surface of the dielectric includes a pad that         electrically connects the chip and the core wire in addition to         the front-surface ground, and the pad is electrically connected         to the core wire.

(Supplementary Note 11)

The sample holder according to any of Supplementary Notes 1 to 10, in which

-   -   the support structure is made of metal or a mixture containing         metal.

(Supplementary Note 12)

The sample holder according to Supplementary Notes 1 to 11, in which

-   -   the base is made of metal.

(Supplementary Note 13)

The sample holder according to Supplementary Notes 1 to 12, in which

-   -   a height of the cavity is larger than a thickness of the chip.

(Supplementary Note 14)

The sample holder according to Supplementary Note 13, in which

-   -   a height of the cavity is twice or more a thickness of the chip.

(Supplementary Note 15)

A superconducting quantum computer including:

-   -   a sample holder; and     -   a chip on which a superconducting quantum circuit is formed, the         chip that is disposed in the sample holder, the sample holder         comprising     -   a base including a support structure, and     -   a PCB in contact with the base, the PCB including:         -   a dielectric;         -   a front-surface ground that is formed on a front surface of             the dielectric;         -   a back-surface ground that is formed on a back surface of             the dielectric;         -   a through hole that penetrates from the front-surface ground             to the back-surface ground, the through hole in which a chip             is disposed; and,         -   a conductor that electrically connects the front-surface             ground and the back-surface ground; wherein the conductor is             disposed on an end face of the through hole,     -   wherein at least a part of the base below the through hole has a         cavity,     -   the support structure supports a surface of the chip and is         electrically connected to the base, and     -   the support structure is disposed in the cavity. 

1. A sample holder comprising: a base comprising a support structure; and a printed circuit board (PCB) in contact with the base, the PCB comprising: a dielectric, a front-surface ground that is formed on a front surface of the dielectric, a back-surface ground that is formed on a back surface of the dielectric, a through hole that penetrates from the front-surface ground to the back-surface ground, wherein a chip is disposed in the through hole, and, a conductor that electrically connects the front-surface ground and the back-surface ground, wherein the conductor is disposed on an end face of the through hole; wherein at least a part of the base below the through hole has a cavity, the support structure supports a surface of the chip and is electrically connected to the base, and the support structure is disposed in the cavity.
 2. The sample holder according to claim 1, wherein at least a part of a section that supports the chip in the support structure is parallel to the surface of the chip.
 3. The sample holder according to claim 2, wherein the support structure is a column.
 4. The sample holder according to claim 3, wherein the support structure is a plurality of columns provided in the cavity.
 5. The sample holder according to claim 4, wherein the plurality of columns are provided at four corners of the cavity.
 6. The sample holder according to claim 5, wherein when each of the plurality of columns is a triangular prism, a length of an equal side of a surface of an isosceles triangle of the triangular prism is shorter than a half of a length of a short side of the surface of the chip.
 7. The sample holder according to claim 1, wherein the PCB has a core wire of a coplanar waveguide on the front surface of the dielectric.
 8. The sample holder according to claim 7, wherein the conductor is provided in an end face of the through hole in a section other than an end face of the PCB in a vicinity of the core wire.
 9. The sample holder according to claim 7, wherein the core wire has such a length not as to come into contact with an end face of the through hole, and the conductor is formed on an entire end face of the through hole.
 10. The sample holder according to claim 1, wherein the PCB further includes a core wire in the dielectric in a region sandwiched between the front-surface ground and the back-surface ground, and the front surface of the dielectric includes a pad that electrically connects the chip and the core wire in addition to the front-surface ground, and the pad is electrically connected to the core wire.
 11. The sample holder according to claim 1, wherein the support structure is made of metal or a mixture containing metal.
 12. The sample holder according to claim 1, wherein the base is made of metal.
 13. The sample holder according to claim 1, wherein a height of the cavity is larger than a thickness of the chip.
 14. The sample holder according to claim 13, wherein a height of the cavity is twice or more a thickness of the chip.
 15. A superconducting quantum computer comprising: a sample holder; and a chip on which a superconducting quantum circuit is formed, the chip that is disposed in the sample holder, the sample holder comprising: a base comprising a support structure; and a PCB in contact with the base, the PCB comprising: a dielectric; a front-surface ground that is formed on a front surface of the dielectric; a back-surface ground that is formed on a back surface of the dielectric; a through hole that penetrates from the front-surface ground to the back-surface ground, the through hole in which a chip is disposed; and, a conductor that electrically connects the front-surface ground and the back-surface ground, wherein the conductor is disposed on an end face of the through hole; wherein at least a part of the base below the through hole has a cavity, the support structure supports a surface of the chip and is electrically connected to the base, and the support structure is disposed in the cavity. 